光学 精密工程, 2017, 25 (8): 2038, 网络出版: 2017-10-16   

真空热处理对硫化锌薄膜光学与微结构特性的影响

Effects of vacuum annealing on optical and microstructure properties of zinc sulfide thin film
作者单位
1 中国航天科工飞航技术研究院 天津津航技术物理研究所 天津市薄膜光学重点实验室,天津 300308
2 哈尔滨工业大学 光电子技术研究所 可调谐激光技术国防科技重点实验室,黑龙江 哈尔滨 150001
引用该论文

刘华松, 姜承慧, 李士达, 杨霄, 季一勤, 张锋, 陈德应. 真空热处理对硫化锌薄膜光学与微结构特性的影响[J]. 光学 精密工程, 2017, 25(8): 2038.

LIU Hua-song, JIANG Cheng-hui, LI Shi-da, YANG Xiao, JI Yi-qin, ZHANG Feng, CHEN De-ying. Effects of vacuum annealing on optical and microstructure properties of zinc sulfide thin film[J]. Optics and Precision Engineering, 2017, 25(8): 2038.

参考文献

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[9] 于天燕, 秦杨, 刘定权. 沉积温度对硫化锌(ZnS)薄膜的结晶和光学特性影响研究[J]. 物理学报, 2013, 62(21): 214211.

    YU T Y, QIN Y, LIU D Q. Investigation of the crystal and optical properties of ZnS thin films deposited at different temperature[J]. Acta Physica Sinica, 2013, 62(21):214211. (in Chinese)

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[13] 刘华松, 季一勤, 张锋, 等. 金属氧化物薄膜在中波红外光谱区内光学常数色散特性[J]. 光学学报, 2014, 34(8): 0831003.

    LIU H S, JI Y Q, ZHANG F, et al.. Dispersive properties of optical constants of some metallic oxide thin films in the mid-infrared regions[J]. Acta Optica Sinica, 2014, 34(8): 0831003. (in Chinese)

刘华松, 姜承慧, 李士达, 杨霄, 季一勤, 张锋, 陈德应. 真空热处理对硫化锌薄膜光学与微结构特性的影响[J]. 光学 精密工程, 2017, 25(8): 2038. LIU Hua-song, JIANG Cheng-hui, LI Shi-da, YANG Xiao, JI Yi-qin, ZHANG Feng, CHEN De-ying. Effects of vacuum annealing on optical and microstructure properties of zinc sulfide thin film[J]. Optics and Precision Engineering, 2017, 25(8): 2038.

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