Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform

Christian Lafforgue; Sylvain Guerber; Joan Manel Ramirez; Guillaume Marcaud; Carlos Alonso-Ramos; Xavier Le Roux; Delphine Marris-Morini; Eric Cassan; Charles Baudot; Frédéric Boeuf; Sébastien Cremer; Stéphane Monfray; Laurent Vivien

doi:doi:10.1364/PRJ.379555

Photonics Research, 2020, 8 (3): 03000352, Published Online: Feb. 21, 2020

Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform Download： 775次

Author Affiliations

¹ Centre for Nanoscience and Nanotechnology (C2N), CNRS, Université Paris-Sud, Université Paris-Saclay, UMR 9001, 91405 Orsay Cedex, France

² Technologie R&D, STMicroelectronics, SAS, 850 rue Jean Monnet, 38920 Crolles, France

³ III-V lab, a joint venture from Nokia Bell Labs, Thales and CEA, 1 Avenue Augustin Fresnel, 91767 Palaiseau Cedex, France

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Christian Lafforgue, Sylvain Guerber, Joan Manel Ramirez, Guillaume Marcaud, Carlos Alonso-Ramos, Xavier Le Roux, Delphine Marris-Morini, Eric Cassan, Charles Baudot, Frédéric Boeuf, Sébastien Cremer, Stéphane Monfray, Laurent Vivien. Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform[J]. Photonics Research, 2020, 8(3): 03000352.

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