Photonics Research, 2020, 8 (3): 03000352, Published Online: Feb. 21, 2020
Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform 
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Fig. 1. (a) Schematic view of the waveguide section; (b) SEM view of spiral waveguide; (c) and (d) TE mode profile at 1200 nm wavelength for a 700 nm-wide waveguide and a 1200 nm-wide waveguide, respectively; (e) schematic view of the final design for the straight waveguide (top view).
Fig. 2. (a) Refractive index of N-rich SiN x Si 3 N 4 SiN x
Fig. 3. Schematic view of the experimental setup. HWP, half-wave plate; PBS, polarization beam splitter; 60 × 20 ×
Fig. 4. (a) Experimental spectra for the 8.6 mm-long, 1200 nm-wide waveguide (blue dotted line) and the threefold 3 mm-long waveguide (black line) for an input peak power of 3.8 kW; (b) and (c) optical images of the 3 mm-long straight waveguide and the 8.6 mm-long spiral, respectively, from above, showing green and blue scattered light; (d) experimental (black lines) and simulated (green lines) spectra for different input peak powers; from bottom to top: 250 W, 950 W, 3.8 kW. Curves are arbitrarily shifted for better understanding. (e) Spectral evolution along the propagation direction for the simulated SCG 3.8 kW peak power.
Fig. 6. (a) First-order degree of coherence plotted as a function of wavelength and propagation distance; (b) and (c) individual simulated spectra (blue lines), average of all the spectra (black line), and degree of mutual coherence (orange line) for a 3 mm-long and a 1.7 mm-long waveguide, respectively.
Christian Lafforgue, Sylvain Guerber, Joan Manel Ramirez, Guillaume Marcaud, Carlos Alonso-Ramos, Xavier Le Roux, Delphine Marris-Morini, Eric Cassan, Charles Baudot, Frédéric Boeuf, Sébastien Cremer, Stéphane Monfray, Laurent Vivien. Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform[J]. Photonics Research, 2020, 8(3): 03000352.
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