激光与光电子学进展, 2020, 57 (15): 151202, 网络出版: 2020-08-04
基于振动节点优化提高双频激光干涉仪的测量精度 
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Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization
图 & 表
图 1. 双频激光干涉仪的工作原理图
Fig. 1. Working principle diagram of dual frequency laser interferometer
图 3. 干涉计与L型大理石上加速度计的布置
Fig. 3. Arrangement of interferometer and accelerometer on L-shaped marble
图 4. L型大理石及干涉计的频率响应函数测试结果
Fig. 4. Test results of frequency response function of L-shaped marble and interferometer
图 6. CCR及Z轴向运动金属板上加速度计的分布
Fig. 6. Distribution of accelerometer on CCR and Z axis direction moving metal plate
图 7. 可动机构及反射镜的频率响应函数测试结果。(a)金属板在X/Y轴方向上的振动频率响应函数;(b)三个测量反射镜的振动频率响应函数
Fig. 7. Test results of frequency response function of movable mechanism and mirror. (a) Vibration frequency response function of metal plate in X/Y axis direction; (b) vibration frequency response function of three measuring mirrors
图 8. 无外界振动时三轴的干涉仪测量重复性
Fig. 8. Measurement repeatability of triaxial interferometer without external vibration
图 9. 无外界振动时重复性测量数据的傅里叶频谱分析
Fig. 9. Fourier spectrum analysis of repeatable measurement data without external vibration
图 10. Z轴运动机构闭环情况下三轴的干涉仪测量重复性
Fig. 10. Measurement repeatability of three-axis interferometer under closed loop of Z-axis motion mechanism
于海娇, 赵国罡. 基于振动节点优化提高双频激光干涉仪的测量精度[J]. 激光与光电子学进展, 2020, 57(15): 151202. Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202.
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