激光与光电子学进展, 2020, 57 (23): 231404, 网络出版: 2020-11-25 复制并引用该论文  本文已被引 2 次  被引通知

图 & 表

图 1. 掩模板四圆孔分布及其傅里叶空间频谱。(a)掩模板; (b)掩模板的傅里叶空间频谱

Fig. 1. Distribution of four circular holes in the mask and its Fourier spatial spectrum. (a) A mask; (b) Fourier spatial spectrum of the mask

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图 2. 加工装置与结果。(a)CO₂激光加工制备点阵结构示意图(放大部分为掩模板);(b)熔融石英玻璃基底上制备的 3×3点阵结构(显微镜图,右上角为单个凹槽的放大图);(c)盖玻片基底上制备的5×5点阵结构(显微镜图)

Fig. 2. Processing equipment and results.(a) CO₂ laser processing diagram for processing lattice structure(enlarged image for mask); (b) 3×3 lattice structure prepared on fused silica substrate (microscope picture, the picture in the upper right corner is an enlarged view of a single structure); (c) 5×5 lattice structure prepared on the cover slip substrate (microscope picture)

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图 3. 结构的一维深度分布。(a)点阵中心三个结构点的一维深度分布;(b)点阵中心上方两个结构点的一维深度分布;(c)最上方单个结构点的一维深度分布

Fig. 3. One-dimensional depth distribution of structure.(a) One-dimensional depth distribution of three structural points in the center of the lattice; (b) one-dimensional depth distribution of two structural points above the center of the lattice; (c) one-dimensional depth distribution of the top single structural point

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图 4. FP微腔组装与激光测试。(a)FP微腔的组装;(b)光微流激光测试装置;(c) CCD采集的激光出射远场图;(d)激光光谱图

Fig. 4. FP microcavity assembly and laser testing. (a) Assembly of FP microcavity; (b) optofluidic laser test device; (c) far field image of laser emission collected by CCD; (d) laser spectrum

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贾卓楠, 张婷婷, 栗正华, 花双全, 王文杰. 基于CO₂激光加工的法布里-珀罗光学微腔阵列的制备[J]. 激光与光电子学进展, 2020, 57(23): 231404. Zhuonan Jia, Tingting Zhang, Zhenghua Li, Shuangquan Hua, Wenjie Wang. Fabrication of Fabry-Pérot Optical Microcavity Array Based on CO₂ Laser Processing[J]. Laser & Optoelectronics Progress, 2020, 57(23): 231404.