激光与光电子学进展, 2019, 56 (17): 170625, 网络出版: 2019-09-05
一种高精细度MEMS光纤F-P压力传感器 下载: 1061次
A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS
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张韬杰, 江毅, 马维一. 一种高精细度MEMS光纤F-P压力传感器[J]. 激光与光电子学进展, 2019, 56(17): 170625.
Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625.
张韬杰, 江毅, 马维一. 一种高精细度MEMS光纤F-P压力传感器[J]. 激光与光电子学进展, 2019, 56(17): 170625. Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625.