[1] Bueno J M, Acosta E, Schwarz C, et al. Wavefront measurements of phase plates combining a point-diffraction interferometer and a Hartmann-Shack sensor[J]. Applied Optics, 2010, 49(3): 450-456.

    Bueno J M, Acosta E, Schwarz C, et al. Wavefront measurements of phase plates combining a point-diffraction interferometer and a Hartmann-Shack sensor[J]. Applied Optics, 2010, 49(3): 450-456.

[2] 余玉华, 董文德, 徐之海, 等. 基于哈特曼夏克波前传感器的模糊图像复原方法[J]. 光学学报, 2012, 32(8): 0828005.

    余玉华, 董文德, 徐之海, 等. 基于哈特曼夏克波前传感器的模糊图像复原方法[J]. 光学学报, 2012, 32(8): 0828005.

    Yu Y H, Dong W D, Xu Z H, et al. Method for blurred image restoration based on Hartmann-Shack wavefront sensor[J]. Acta Optica Sinica, 2012, 32(8): 0828005.

    Yu Y H, Dong W D, Xu Z H, et al. Method for blurred image restoration based on Hartmann-Shack wavefront sensor[J]. Acta Optica Sinica, 2012, 32(8): 0828005.

[3] Ouchi C, Kato S, Hasegawa M, et al. EUV wavefront metrology at EUVA[J]. Proceedings of SPIE, 2006, 6152: 61522O.

    Ouchi C, Kato S, Hasegawa M, et al. EUV wavefront metrology at EUVA[J]. Proceedings of SPIE, 2006, 6152: 61522O.

[4] 于长淞, 向阳. 点衍射干涉仪小孔掩模技术研究进展[J]. 激光与光电子学进展, 2013, 50(3): 030004.

    于长淞, 向阳. 点衍射干涉仪小孔掩模技术研究进展[J]. 激光与光电子学进展, 2013, 50(3): 030004.

    Yu C S, Xiang Y. Research progress of pinhole mask technology of point diffraction interferometer[J]. Laser & Optoelectronics Progress, 2013, 50(3): 030004.

    Yu C S, Xiang Y. Research progress of pinhole mask technology of point diffraction interferometer[J]. Laser & Optoelectronics Progress, 2013, 50(3): 030004.

[5] Wyant J C. Double frequency grating lateral shear interferometer[J]. Applied Optics, 1973, 12(9): 2057-2060.

    Wyant J C. Double frequency grating lateral shear interferometer[J]. Applied Optics, 1973, 12(9): 2057-2060.

[6] Schreiber H, Schwider J. Lateral shearing interferometer based on two Ronchi phase gratings in series[J]. Applied Optics, 1997, 36(22): 5321-5324.

    Schreiber H, Schwider J. Lateral shearing interferometer based on two Ronchi phase gratings in series[J]. Applied Optics, 1997, 36(22): 5321-5324.

[7] 周平伟, 马宏财. 镜面面形误差统计方法研究[J]. 激光与光电子学进展, 2016, 53(4): 041201.

    周平伟, 马宏财. 镜面面形误差统计方法研究[J]. 激光与光电子学进展, 2016, 53(4): 041201.

    Zhou P W, Ma H C. Research of statistical methods for mirror surface figure error[J]. Laser & Optoelectronics Progress, 2016, 53(4): 041201.

    Zhou P W, Ma H C. Research of statistical methods for mirror surface figure error[J]. Laser & Optoelectronics Progress, 2016, 53(4): 041201.

[8] Jensen A E. Absolute calibration method for laser Twyman-Green wavefront testing interferometers[J]. Journal of the Optical Society of America A, 1973, 63: 1313A.

    Jensen A E. Absolute calibration method for laser Twyman-Green wavefront testing interferometers[J]. Journal of the Optical Society of America A, 1973, 63: 1313A.

[9] MalacaraD. Optical shop testing[M]. New York: John Wiley & Sons, 1992.

    MalacaraD. Optical shop testing[M]. New York: John Wiley & Sons, 1992.

[10] Parks R. Removal of test optics errors[J]. Proceedings of SPIE, 1978, 153: 56-63.

    Parks R. Removal of test optics errors[J]. Proceedings of SPIE, 1978, 153: 56-63.

[11] Creath K, Wyant J C. Testing spherical surfaces: A fast, quasi-absolute technique[J]. Applied Optics, 1992, 31(22): 4350-4354.

    Creath K, Wyant J C. Testing spherical surfaces: A fast, quasi-absolute technique[J]. Applied Optics, 1992, 31(22): 4350-4354.

[12] Evans C J, Kestner R N. Test optics error removal[J]. Applied Optics, 1996, 35(7): 1015-1021.

    Evans C J, Kestner R N. Test optics error removal[J]. Applied Optics, 1996, 35(7): 1015-1021.

[13] Mack S K, Rich T, Webb J E, et al. Error separation technique for microlithographic lens testing with null configurations[J]. Proceedings of SPIE, 2001, 4346: 1328-1339.

    Mack S K, Rich T, Webb J E, et al. Error separation technique for microlithographic lens testing with null configurations[J]. Proceedings of SPIE, 2001, 4346: 1328-1339.

[14] Schreiner R, Schwider J, Lindlein N, et al. Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions[J]. Applied Optics, 2008, 47(32): 6134-6141.

    Schreiner R, Schwider J, Lindlein N, et al. Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions[J]. Applied Optics, 2008, 47(32): 6134-6141.

[15] Su D, Miao E, Sui Y, et al. Absolute surface figure testing by shift-rotation method using Zernike polynomials[J]. Optics Letters, 2012, 37(15): 3198-3200.

    Su D, Miao E, Sui Y, et al. Absolute surface figure testing by shift-rotation method using Zernike polynomials[J]. Optics Letters, 2012, 37(15): 3198-3200.

[16] Wang W, Zhang M, Yan S, et al. Absolute spherical surface metrology by differencing rotation maps[J]. Applied Optics, 2015, 54(20): 6186-6189.

    Wang W, Zhang M, Yan S, et al. Absolute spherical surface metrology by differencing rotation maps[J]. Applied Optics, 2015, 54(20): 6186-6189.

[17] Song W, Wu F, Hou X. Method to test rotationally asymmetric surface deviation with high accuracy[J]. Applied Optics, 2012, 51(22): 5567-5572.

    Song W, Wu F, Hou X. Method to test rotationally asymmetric surface deviation with high accuracy[J]. Applied Optics, 2012, 51(22): 5567-5572.

[18] Han Z G, Yin L, Chen L, et al. Absolute flatness testing of skip-flat interferometry by matrix analysis in polar coordinates[J]. Applied Optics, 2016, 55(9): 2387-2392.

    Han Z G, Yin L, Chen L, et al. Absolute flatness testing of skip-flat interferometry by matrix analysis in polar coordinates[J]. Applied Optics, 2016, 55(9): 2387-2392.

[19] 张齐元, 韩森, 唐寿鸿, 等. 透射波前Zernike系数与波长的函数关系研究[J]. 光学学报, 2018, 38(2): 0212002.

    张齐元, 韩森, 唐寿鸿, 等. 透射波前Zernike系数与波长的函数关系研究[J]. 光学学报, 2018, 38(2): 0212002.

    Zhang Q Y, Han S, Tang S H, et al. Study on functional relationship between transmitted wavefront Zernike coefficients and wavelengths[J]. Acta Optica Sinica, 2018, 38(2): 0212002.

    Zhang Q Y, Han S, Tang S H, et al. Study on functional relationship between transmitted wavefront Zernike coefficients and wavelengths[J]. Acta Optica Sinica, 2018, 38(2): 0212002.

[20] 何煦, 向阳. 数字横向剪切干涉仪相移技术[J]. 光学精密工程, 2013, 21(9): 2244-2251.

    何煦, 向阳. 数字横向剪切干涉仪相移技术[J]. 光学精密工程, 2013, 21(9): 2244-2251.

    He X, Xiang Y. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244-2251.

    He X, Xiang Y. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244-2251.

[21] 张春雷, 向阳, 于长淞. 高精度干涉仪针孔空间滤波器研制[J]. 中国光学, 2013, 6(6): 952-957.

    张春雷, 向阳, 于长淞. 高精度干涉仪针孔空间滤波器研制[J]. 中国光学, 2013, 6(6): 952-957.

    Zhang C L, Xiang Y, Yu C S. Development of pinhole filter in high precision interferometer[J]. Chinese Optics, 2013, 6(6): 952-957.

    Zhang C L, Xiang Y, Yu C S. Development of pinhole filter in high precision interferometer[J]. Chinese Optics, 2013, 6(6): 952-957.

[22] 方超. 九步相移抗串扰算法的相移误差分析[J]. 长春理工大学学报(自然科学版), 2012, 35(4): 21-23.

    方超. 九步相移抗串扰算法的相移误差分析[J]. 长春理工大学学报(自然科学版), 2012, 35(4): 21-23.

    Fang C. The analysis of phase shifting error in a 9 step phase shifting algorithm[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2012, 35(4): 21-23.

    Fang C. The analysis of phase shifting error in a 9 step phase shifting algorithm[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2012, 35(4): 21-23.