三级次太阳极紫外窄波段无狭缝成像光谱仪光学设计 
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Optical Design of 3-Order Solar Extreme Ultraviolet Narrowband Slitless Imaging Spectrometer
1 北京理工大学光电学院, 北京 100081
2 北京卫星环境工程研究所, 北京 100094
3 可靠性与环境工程技术国家重点实验室, 北京 100094
4 清华大学精密仪器系, 北京 100091
图 & 表
图 1. 三级次无狭缝成像光谱仪的示意图。(a)MOSES的光学布局;(b)单次快照获得的三级次太阳图像
Fig. 1. Schematic of three-order slitless imaging spectrometer. (a) Optical layout of MOSES; (b) solar images with three diffraction orders by single snapshot
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图 2. 具有新光学布局的三级次无狭缝成像光谱仪示意图
Fig. 2. Schematic of three-order slitless imaging spectrometer with new optical layout
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图 3. 三级次无狭缝成像光谱仪的光线追迹模型
Fig. 3. Ray-tracing model for three-order slitless imaging spectrometer
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图 4. 离轴双曲面反射镜的几何光学模型
Fig. 4. Geometric optics model for off-axis hyperbolic mirror
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图 5. 像差校正的EVLS光栅的原理图
Fig. 5. Schematic of aberration-corrected EVLS grating
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图 6. SDO/EVE仪器获得的闪耀太阳光谱
Fig. 6. Sun flare spectrum from SDO/EVE
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图 7. 太阳极紫外无狭缝成像光谱仪的光路原理图。(a) 2D光路图;(b) 3D模型图
Fig. 7. Optical layout of solar EUV slitless imaging spectrometer. (a) 2D optical layout; (b) 3D model diagram
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图 8. 椭球面变线距光栅刻线密度的分布曲线
Fig. 8. Ruling density distribution of EVLS grating
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图 9. 像散的像差系数曲线图。(a) -1级次的子午像散;(b) +1级次的子午像散;(c) -1级次的弧矢像散;(d) +1级次的弧矢像散
Fig. 9. Curve of aberration term of astigmatisms. (a) Tangential astigmatism for -1 order; (b) tangential astigmatism for +1 order; (c) sagittal astigmatism for -1 order; (d) sagittal astigmatism for +1 order
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图 10. 彗差的像差系数曲线图。(a) -1级次彗差;(b) +1级次彗差
Fig. 10. Curve of aberration term of coma. (a) Coma for -1 order; (b) coma for +1 order
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图 11. 边缘视场下最大网格畸变随波长变化的曲线图。(a) -1级次;(b) +1级次
Fig. 11. Maximum grid distortion change with wavelength under marginal FOV. (a) -1 order; (b) +1 order
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图 12. -1级次下弥散斑RMS半径的变化曲线图。(a)不同离轴视场下RMS半径随波长变化的曲线图;(b)不同波长下RMS半径随视场变化的曲线图
Fig. 12. Variation of RMS radius of spot for -1 order. (a) RMS radius of spot versus wavelength in the different off-axis FOVs; (b) RMS radius of spot versus FOV in the different wavelength
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图 13. +1级次下弥散斑RMS半径的变化曲线图。(a)不同离轴视场下RMS半径随波长变化的曲线图;(b)不同波长RMS半径随视场变化的曲线图
Fig. 13. Variation of RMS radius of spot for +1 order. (a) RMS radius of spot versus wavelength in the different off-axis FOVs; (b) RMS radius of spot versus FOV in the different wavelength
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图 14. 0级次像面上的点列图以及0级次弥散斑RMS半径随视场变化的曲线图。(a)不同视场下0级次像面上的点列图;(b) 0级次弥散斑RMS半径随视场变化的曲线图
Fig. 14. Spot diagrams in 0 order imaging plane under the different FOVs and RMS radius of spot versus FOV for 0 order. (a) Spot diagrams in 0 order imaging plane under the different FOVs; (b) RMS radius of spot versus FOV for 0 order
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图 15. 光学系统在不同衍射级次下的调制传递函数。(a) -1级次;(b) +1级次;(c) 0级次
Fig. 15. MTFs of design system under different diffraction orders. (a) -1 order; (b) +1 order; (c) 0 order
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图 16. 用于评估系统空间分辨率的衍射包围圆能量。(a) -1级次;(b) +1级次;(c) 0级次
Fig. 16. Diffraction enclosed energy to evaluate system’s spatial resolution. (a) -1 order; (b) +1 order; (c) 0 order
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图 17. ±1衍射级次的光谱分辨率仿真验证。(a)(b) -1级次;(c)(d) +1级次
Fig. 17. Spectral resolution simulation verification for ±1 diffraction orders. (a)(b) -1 order; (c)(d) +1 order
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图 18. 0.1 μm厚硅滤光片的透过率曲线
Fig. 18. Transmission of Si filter with 0.1 μm thickness
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图 19. SiC/Mg多层膜随波长变化的反射率曲线
Fig. 19. Reflectance versus wavelength for SiC/Mg multilayer
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图 20. EVLS光栅效率随波长的变化曲线
Fig. 20. Efficiency versus wavelength for EVLS grating
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图 21. 无狭缝成像光谱仪有效面积随波长的变化曲线
Fig. 21. Effective area of slitless imaging spectrometer versus wavelength
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表 1太阳极紫外无狭缝成像光谱仪的技术指标
Table1. Specifications of the solar EUV slitless imaging spectrometer
| Instrument | Wavelength /nm | 2D FOV /(arcmin×arcmin) | Spatialresolution /arcsec | Spectralresolution /(10-4 nm) | Primarymirror | Secondarymirror | Length /mm |
|---|
| MOSES-06 | 29.4--31.4 | 10×20 | 0.6 | 30 | SULS grating | Fold flat | 2400 | | Our design | 29.4--31.4 | 20×20 | 0.6 | 35 | Hyperbola | EVLS grating | 910 |
|
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表 2Fjk及其对应的像差
Table2. Fjk terms with their associate aberrations
| Term | Aberration |
|---|
| F10 and F01 | Basic grating equation | | F20 | Tangential astigmatism | | F02 | Sagittal astigmatism | | F11 | Off-axis defocusing | | F30 and F21 | Coma | | F12 | Field curvature | | F40, F22 and F04 | Spherical aberration |
|
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表 3无狭缝成像光谱仪的技术指标和光学元件参数
Table3. Specifications and optical element parameters for slitless imaging spectrometer
| Specification |
|---|
| Spectral range /nm | 29.4--31.4 | | FOV /(arcmin×arcmin) | 20×20 | | Spectral resolution /(10-4 nm) | 35 | | Spatial resolution /arcsec | 0.6 (440 km) | | Line-of-sight velocity /(km·s-1) | >34.5 | | High cadence /s | <10 | | System focal length /mm | 4500 | | Pixel size of detectors /μm | 13 (2048×2048) | | Envelope size of optical system /(mm×mm×mm) | 910×310×60 | | Telescope design | | RT /mm | 1520 | | Conic | -1.307 | | Δ /mm | 80 | | Spectral imaging system design | | Field stop size /(mm×mm) | 4.5×4.5 | | /mm-1 | 3600 | | m | +1 order, 0 order, and -1 order | | Grating parameter | Initial | Optimum | | rA /mm | 150 | 150 | | β | 6× | 5.905× | | i /(°) | 5.13 | 5.4 | | a /mm | 360.000 | 352.906 | | b /mm | 305.010 | 300.957 | | c /mm | 302.425 | 300.034 | | ζ2 | -0.04448 | -0.04736 | | ζ3 | -0.006852 | -0.007201 | | Ruling area /(mm×mm) | 25×25 | | Three independent detectors design | | Order | Wavelength /nm | Tilt angle of detectors /(°) | | -1 order | 29.4--31.4 | 14.66 | | 0 order | 29.4--31.4 | 27.95 | | +1 order | 29.4--31.4 | 32.71 |
|
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表 4周期性SiC/Mg多层膜的参数
Table4. Periodic SiC/Mg multilayer parameters
| γ /(°) | d / nm | τ | N | δSiC-Mg /nm | δMg-SiC /nm |
|---|
| 84.6 | 15.27 | 0.22 | 40 | 2.0 | 1.0 |
|
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邢阳光, 李林, 彭吉龙, 王姗姗, 成一诺. 三级次太阳极紫外窄波段无狭缝成像光谱仪光学设计[J]. 光学学报, 2021, 41(7): 0730003. Yangguang Xing, Lin Li, Jilong Peng, Shanshan Wang, Yinuo Cheng. Optical Design of 3-Order Solar Extreme Ultraviolet Narrowband Slitless Imaging Spectrometer[J]. Acta Optica Sinica, 2021, 41(7): 0730003.
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