光电子技术, 2016, 36 (1): 5, 网络出版: 2016-12-07
零差激光干涉仪的大范围位移测量与精度分析
Large-range Displacement Measurement and Accuracy Analysis of Homodyne Laser Interferometer
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祝宏彬, 陈俊雹, 郭冬梅, 张佳欢, 王鸣. 零差激光干涉仪的大范围位移测量与精度分析[J]. 光电子技术, 2016, 36(1): 5. ZHU Hongbin, CHEN Junbao, GUO Dongmei, ZHANG Jiahuan, WANG Ming. Large-range Displacement Measurement and Accuracy Analysis of Homodyne Laser Interferometer[J]. Optoelectronic Technology, 2016, 36(1): 5.