X射线衍射、X射线光电子能谱对PtSi薄膜形成机理的研究
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刘爽, 宁永功, 陈艾, 龙再川, 杨家德. X射线衍射、X射线光电子能谱对PtSi薄膜形成机理的研究[J]. 红外与激光工程, 2001, 30(1): 66. 刘爽, 宁永功, 陈艾, 龙再川, 杨家德. Study on the formation mechanism of PtSi film by X-ray diffraction and X-ray photo spectrum[J]. Infrared and Laser Engineering, 2001, 30(1): 66.
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