纳米操作技术研究及应用进展

王根旺; 管延超; 王扬; 丁烨; 杨立军

doi:doi:10.3788/CJL202148.0802018

中国激光, 2021, 48 (8): 0802018, 网络出版: 2021-04-12

纳米操作技术研究及应用进展下载： 1422次特邀综述

Recent Progress in Research and Application of Nano-Manipulation Technologies

王根旺 ^1,2管延超 ^1,2王扬 ^1,2丁烨 ^1,2,**杨立军 ^1,2,*

作者单位

¹ 哈尔滨工业大学微系统与微结构制造教育部重点实验室, 黑龙江哈尔滨 150001

² 哈尔滨工业大学机电工程学院, 黑龙江哈尔滨 150001

图 & 表

图 1. 基于SPM的典型纳米操作的基本原理^[20]

Fig. 1. Principle of typical nano-manipulation based on SPM^[20]

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图 2. 获取实时成像信息的纳米操作技术。(a) 具有同步视觉引导的纳米操作技术原理图^[21];(b)以运动粒子后的“鬼影”作为视觉信息^[21];(c)同时进行成像与操作的系统的原理图^[23]

Fig. 2. Nano-manipulation for acquiring real-time imaging. (a) Schematic of nano-manipulation with simultaneous visual guidance^[21]; (b) ghost images behind the moving particle provide a visual guidance^[21]; (c) schematic of the parallel imaging/manipulation system^[23]

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图 3. Au NSs的三维装配过程示意图^[28]。(a)Au NSs被转移至具有圆形槽的PMMA基底上;(b)三个颗粒被推移至基底孔结构的底部形成三聚体;(c)将最后一个颗粒移至三聚体上部

Fig. 3. Schematic of the “3D” assembly of Au NSs^[28]. (a) Au NSs were printed onto a PMMA nanohole template; (b) three Au NSs were pushed and dropped onto the bottom of the PMMA nanohole to form trimer; (c) remaining Au NS was pushed onto the already assembled trimer

下载图片查看原文

图 4. 利用AFM操作Au NWs制造电路结构^[33]。(a) 操作前的NWs分布;(b)操作后制造的电路结构

Fig. 4. AFM nano-manipulation of gold nanowires to build electrical circuits^[33]. (a) Distribution of nanowires before manipulation; (b) electrical circuits after manipulation

下载图片查看原文

图 5. 纳米操作机器人及其在纳米材料测试中的应用^[35]。(a)纳米操作机器人;(b)纳米管的拉伸

Fig. 5. Nanorobotic manipulators and its application in testing of nanomaterials^[35]. (a) Nanorobotic manipulators; (b) stretching of nanotubes

下载图片查看原文

图 6. 具有视觉反馈控制的操作系统^[42]。(a)操作平台;(b)利用AFM探针悬臂拾取碳纳米管

Fig. 6. Manipulation system with vision feedback control^[42]. (a) Manipulation system; (b) CNT picked up with AFM cantilever

下载图片查看原文

图 7. 碳纳米管与金电极的互连及电学性能测试^[60]。(a)连接结构的SEM图;(b)碳纳米管与金电极的互连I-V曲线

Fig. 7. CNT/Au contact and electrical performance measurement^[60]. (a) SEM image of connection structure; (b) measured I-V curve of CNT/Au contact

下载图片查看原文

图 8. 利用贝塞尔光束实现NWs的捕获及旋转操作^[66]

Fig. 8. Trapping and rotation of Ag nanowires by the Bessel-beam^[66]

下载图片查看原文

图 9. 光镊操作中的近场光增强方法。(a)二维等离子基元光学晶格结构^[75];(b)双纳米孔结构^[77]

Fig. 9. Enhancement of near-field optical tweezers manipulation. (a) Two-dimensional nanoscale plasmonic optical lattice^[75]; (b) double-nanohole structures^[77]

下载图片查看原文

图 10. 利用四芯光纤探针进行捕获及操作^[80]。(a)捕获操作原理示意图;(b)光纤末端结构的SEM图

Fig. 10. Trapping and manipulation by using the four-core fiber^[80]. (a) Schematic of trapping and manipulation; (b) SEM image of fiber-end

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表 1基于SPM、EM的纳米操作技术和光镊技术的特点及应用范围

Table1. Characteristic and application of nano-manipulation based on SPM, EM, and optical tweezers

Method
Nano-manipulationbased on SPM	Force-feedback system for accurately locating;Three-dimensional location information of objectives and probes	Limitation in real-time imaging during manipulation;Inadequacy in complexmanipulation	Simple and high-precision manipulation for small objectives
Nano-manipulationbased on EM	Real-time imaging during manipulation;Complex manipulation by using a variety of tools	Lack of depth information of objectives and probes;Only suitable for objectives which can withstand vacuum and irradiation of electron beam	Three-dimensional and complex manipulation;Fabrication and assembly of nano-structures
Optical tweezers	Non-contact manipulation;Suitable for particles up to several nanometers in diameter	Small optical forces;Manipulation in liquidenvironment	Trapping smaller objectives;Simple movement of objectives

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王根旺, 管延超, 王扬, 丁烨, 杨立军. 纳米操作技术研究及应用进展[J]. 中国激光, 2021, 48(8): 0802018. Genwang Wang, Yanchao Guan, Yang Wang, Ye Ding, Lijun Yang. Recent Progress in Research and Application of Nano-Manipulation Technologies[J]. Chinese Journal of Lasers, 2021, 48(8): 0802018.

纳米操作技术研究及应用进展下载： 1422次特邀综述

图 1. 基于SPM的典型纳米操作的基本原理^[20]

Fig. 1. Principle of typical nano-manipulation based on SPM^[20]

图 2. 获取实时成像信息的纳米操作技术。(a) 具有同步视觉引导的纳米操作技术原理图^[21];(b)以运动粒子后的“鬼影”作为视觉信息^[21];(c)同时进行成像与操作的系统的原理图^[23]

Fig. 2. Nano-manipulation for acquiring real-time imaging. (a) Schematic of nano-manipulation with simultaneous visual guidance^[21]; (b) ghost images behind the moving particle provide a visual guidance^[21]; (c) schematic of the parallel imaging/manipulation system^[23]

图 3. Au NSs的三维装配过程示意图^[28]。(a)Au NSs被转移至具有圆形槽的PMMA基底上;(b)三个颗粒被推移至基底孔结构的底部形成三聚体;(c)将最后一个颗粒移至三聚体上部

Fig. 3. Schematic of the “3D” assembly of Au NSs^[28]. (a) Au NSs were printed onto a PMMA nanohole template; (b) three Au NSs were pushed and dropped onto the bottom of the PMMA nanohole to form trimer; (c) remaining Au NS was pushed onto the already assembled trimer

图 4. 利用AFM操作Au NWs制造电路结构^[33]。(a) 操作前的NWs分布;(b)操作后制造的电路结构

Fig. 4. AFM nano-manipulation of gold nanowires to build electrical circuits^[33]. (a) Distribution of nanowires before manipulation; (b) electrical circuits after manipulation

图 5. 纳米操作机器人及其在纳米材料测试中的应用^[35]。(a)纳米操作机器人;(b)纳米管的拉伸

Fig. 5. Nanorobotic manipulators and its application in testing of nanomaterials^[35]. (a) Nanorobotic manipulators; (b) stretching of nanotubes

图 6. 具有视觉反馈控制的操作系统^[42]。(a)操作平台;(b)利用AFM探针悬臂拾取碳纳米管

Fig. 6. Manipulation system with vision feedback control^[42]. (a) Manipulation system; (b) CNT picked up with AFM cantilever

图 7. 碳纳米管与金电极的互连及电学性能测试^[60]。(a)连接结构的SEM图;(b)碳纳米管与金电极的互连I-V曲线

Fig. 7. CNT/Au contact and electrical performance measurement^[60]. (a) SEM image of connection structure; (b) measured I-V curve of CNT/Au contact

图 8. 利用贝塞尔光束实现NWs的捕获及旋转操作^[66]

Fig. 8. Trapping and rotation of Ag nanowires by the Bessel-beam^[66]

图 9. 光镊操作中的近场光增强方法。(a)二维等离子基元光学晶格结构^[75];(b)双纳米孔结构^[77]

Fig. 9. Enhancement of near-field optical tweezers manipulation. (a) Two-dimensional nanoscale plasmonic optical lattice^[75]; (b) double-nanohole structures^[77]

图 10. 利用四芯光纤探针进行捕获及操作^[80]。(a)捕获操作原理示意图;(b)光纤末端结构的SEM图

Fig. 10. Trapping and manipulation by using the four-core fiber^[80]. (a) Schematic of trapping and manipulation; (b) SEM image of fiber-end

表 1基于SPM、EM的纳米操作技术和光镊技术的特点及应用范围

Table1. Characteristic and application of nano-manipulation based on SPM, EM, and optical tweezers

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图 1. 基于SPM的典型纳米操作的基本原理[20]

Fig. 1. Principle of typical nano-manipulation based on SPM[20]

图 2. 获取实时成像信息的纳米操作技术。(a) 具有同步视觉引导的纳米操作技术原理图[21];(b)以运动粒子后的“鬼影”作为视觉信息[21];(c)同时进行成像与操作的系统的原理图[23]

Fig. 2. Nano-manipulation for acquiring real-time imaging. (a) Schematic of nano-manipulation with simultaneous visual guidance[21]; (b) ghost images behind the moving particle provide a visual guidance[21]; (c) schematic of the parallel imaging/manipulation system[23]

图 3. Au NSs的三维装配过程示意图[28]。(a)Au NSs被转移至具有圆形槽的PMMA基底上;(b)三个颗粒被推移至基底孔结构的底部形成三聚体;(c)将最后一个颗粒移至三聚体上部

Fig. 3. Schematic of the “3D” assembly of Au NSs[28]. (a) Au NSs were printed onto a PMMA nanohole template; (b) three Au NSs were pushed and dropped onto the bottom of the PMMA nanohole to form trimer; (c) remaining Au NS was pushed onto the already assembled trimer

图 4. 利用AFM操作Au NWs制造电路结构[33]。(a) 操作前的NWs分布;(b)操作后制造的电路结构

Fig. 4. AFM nano-manipulation of gold nanowires to build electrical circuits[33]. (a) Distribution of nanowires before manipulation; (b) electrical circuits after manipulation

图 5. 纳米操作机器人及其在纳米材料测试中的应用[35]。(a)纳米操作机器人;(b)纳米管的拉伸

Fig. 5. Nanorobotic manipulators and its application in testing of nanomaterials[35]. (a) Nanorobotic manipulators; (b) stretching of nanotubes

图 6. 具有视觉反馈控制的操作系统[42]。(a)操作平台;(b)利用AFM探针悬臂拾取碳纳米管

Fig. 6. Manipulation system with vision feedback control[42]. (a) Manipulation system; (b) CNT picked up with AFM cantilever

图 7. 碳纳米管与金电极的互连及电学性能测试[60]。(a)连接结构的SEM图;(b)碳纳米管与金电极的互连I-V曲线

Fig. 7. CNT/Au contact and electrical performance measurement[60]. (a) SEM image of connection structure; (b) measured I-V curve of CNT/Au contact

图 8. 利用贝塞尔光束实现NWs的捕获及旋转操作[66]

Fig. 8. Trapping and rotation of Ag nanowires by the Bessel-beam[66]

图 9. 光镊操作中的近场光增强方法。(a)二维等离子基元光学晶格结构[75];(b)双纳米孔结构[77]

Fig. 9. Enhancement of near-field optical tweezers manipulation. (a) Two-dimensional nanoscale plasmonic optical lattice[75]; (b) double-nanohole structures[77]

图 10. 利用四芯光纤探针进行捕获及操作[80]。(a)捕获操作原理示意图;(b)光纤末端结构的SEM图

Fig. 10. Trapping and manipulation by using the four-core fiber[80]. (a) Schematic of trapping and manipulation; (b) SEM image of fiber-end

表 1基于SPM、EM的纳米操作技术和光镊技术的特点及应用范围

Table1. Characteristic and application of nano-manipulation based on SPM, EM, and optical tweezers

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纳米操作技术研究及应用进展下载： 1422次特邀综述

图 1. 基于SPM的典型纳米操作的基本原理^[20]

Fig. 1. Principle of typical nano-manipulation based on SPM^[20]

图 2. 获取实时成像信息的纳米操作技术。(a) 具有同步视觉引导的纳米操作技术原理图^[21];(b)以运动粒子后的“鬼影”作为视觉信息^[21];(c)同时进行成像与操作的系统的原理图^[23]

Fig. 2. Nano-manipulation for acquiring real-time imaging. (a) Schematic of nano-manipulation with simultaneous visual guidance^[21]; (b) ghost images behind the moving particle provide a visual guidance^[21]; (c) schematic of the parallel imaging/manipulation system^[23]

图 3. Au NSs的三维装配过程示意图^[28]。(a)Au NSs被转移至具有圆形槽的PMMA基底上;(b)三个颗粒被推移至基底孔结构的底部形成三聚体;(c)将最后一个颗粒移至三聚体上部

Fig. 3. Schematic of the “3D” assembly of Au NSs^[28]. (a) Au NSs were printed onto a PMMA nanohole template; (b) three Au NSs were pushed and dropped onto the bottom of the PMMA nanohole to form trimer; (c) remaining Au NS was pushed onto the already assembled trimer

图 4. 利用AFM操作Au NWs制造电路结构^[33]。(a) 操作前的NWs分布;(b)操作后制造的电路结构

Fig. 4. AFM nano-manipulation of gold nanowires to build electrical circuits^[33]. (a) Distribution of nanowires before manipulation; (b) electrical circuits after manipulation

图 5. 纳米操作机器人及其在纳米材料测试中的应用^[35]。(a)纳米操作机器人;(b)纳米管的拉伸

Fig. 5. Nanorobotic manipulators and its application in testing of nanomaterials^[35]. (a) Nanorobotic manipulators; (b) stretching of nanotubes

图 6. 具有视觉反馈控制的操作系统^[42]。(a)操作平台;(b)利用AFM探针悬臂拾取碳纳米管

Fig. 6. Manipulation system with vision feedback control^[42]. (a) Manipulation system; (b) CNT picked up with AFM cantilever

图 7. 碳纳米管与金电极的互连及电学性能测试^[60]。(a)连接结构的SEM图;(b)碳纳米管与金电极的互连I-V曲线

Fig. 7. CNT/Au contact and electrical performance measurement^[60]. (a) SEM image of connection structure; (b) measured I-V curve of CNT/Au contact

图 8. 利用贝塞尔光束实现NWs的捕获及旋转操作^[66]

Fig. 8. Trapping and rotation of Ag nanowires by the Bessel-beam^[66]

图 9. 光镊操作中的近场光增强方法。(a)二维等离子基元光学晶格结构^[75];(b)双纳米孔结构^[77]

Fig. 9. Enhancement of near-field optical tweezers manipulation. (a) Two-dimensional nanoscale plasmonic optical lattice^[75]; (b) double-nanohole structures^[77]

图 10. 利用四芯光纤探针进行捕获及操作^[80]。(a)捕获操作原理示意图;(b)光纤末端结构的SEM图

Fig. 10. Trapping and manipulation by using the four-core fiber^[80]. (a) Schematic of trapping and manipulation; (b) SEM image of fiber-end