[1] Chen Q S, Chen Y C, Zhang Z Z, et al. An integrated microwell array platform for cell lasing analysis[J]. Lab on a Chip, 2017, 17(16): 2814-2820.

[2] Liu W M, Wang J C, Wang J Y. Controllable organization and high throughput production of recoverable 3D tumors using pneumatic microfluidics[J]. Lab on a Chip, 2015, 15(4): 1195-1204.

[3] Craighead H. Future lab-on-a-chip technologies for interrogating individual molecules[J]. Nature, 2006, 442(7101): 387.

[4] Guan G F, Wu L D, Bhagat A A, et al. Spiral microchannel with rectangular and trapezoidal cross-sections for size based particle separation[J]. Scientific Reports, 2013, 3: 1475.

[5] Xu B, Hu W J, Du W Q, et al. Arch-like microsorters with multi-modal and clogging-improved filtering functions by using femtosecond laser multifocal parallel microfabrication[J]. Optics Express, 2017, 25(14): 16739-16753.

[6] Xu B, Du W Q, Li J W, et al. High efficiency integration of three-dimensional functional microdevices inside a microfluidic chip by using femtosecond laser multifoci parallel microfabrication[J]. Scientific Reports, 2016, 6: 19989.

[7] Xu B, Shi Y, Lao Z X, et al. Real-time two-photon lithography in controlled flow to create a single-microparticle array and particle-cluster array for optofluidic imaging[J]. Lab on a Chip, 2018, 18(3): 442-450.

[8] McKenna B K, Evans J G, Cheung M C, et al. . A parallel microfluidic flow cytometer for high-content screening[J]. Nature Methods, 2011, 8(5): 401-403.

[9] Hessel V, Löwe H, Schönfeld F. Micromixers——a review on passive and active mixing principles[J]. Chemical Engineering Science, 2005, 60(8/9): 2479-2501.

[10] Günther A, Jensen K F. Multiphase microfluidics: From flow characteristics to chemical and materials synthesis[J]. Lab on a Chip, 2006, 6(12): 1487-1503.

[11] Crews N, Wittwer C, Gale B. Continuous-flow thermal gradient PCR[J]. Biomedical Microdevices, 2008, 10(2): 187-195.

[12] Kim S, Nam T, Park S. Measurement of flow direction and velocity using a micromachined flow sensor[J]. Sensors and Actuators A: Physical, 2004, 114(2/3): 312-318.

[13] Caldas P. Jorge P A S, Rego G, et al. Fiber optic hot-wire flowmeter based on a metallic coated hybrid long period grating/fiber Bragg grating structure[J]. Applied Optics, 2011, 50(17): 2738-2743.

[14] Cheri M S, Latifi H, Sadeghi J, et al. Real-time measurement of flow rate in microfluidic devices using a cantilever-based optofluidic sensor[J]. Analyst, 2014, 139(2): 431-438.

[15] Attia R, Pregibon D C, Doyle P S, et al. Soft microflow sensors[J]. Lab on a Chip, 2009, 9(9): 1213-1218.

[16] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials[J]. Nature Photonics, 2008, 2(4): 219.

[17] 龙婧, 熊伟, 刘莹, 等. 基于飞秒激光直写的三维高定向碳纳米管组装[J]. 中国激光, 2017, 44(1): 0102003.

    Long J, Xiong W, Liu Y, et al. 3D assembly of aligned carbon nanotubes via femtosecond laser direct writing[J]. Chinese Journal of Lasers, 2017, 44(1): 0102003.

[18] Sugioka K, Hanada Y, Midorikawa K. Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips[J]. Laser & Photonics Reviews, 2010, 4(3): 386-400.

[19] 曹小文, 张雷, 于永森, 等. 飞秒激光制备微光学元件及其应用[J]. 中国激光, 2017, 44(1): 0102004.

    Cao X W, Zhang L, Yu Y S, et al. Application of micro-optical components fabricated with femtosecond laser[J]. Chinese Journal of Lasers, 2017, 44(1): 0102004.

[20] Lindken R, Rossi M, Grosse S, et al. Micro-particle image velocimetry (μPIV): Recent developments, applications, and guidelines[J]. Lab on a Chip, 2009, 9(17): 2551-2567.