中国激光, 2018, 45 (9): 0902001, 网络出版: 2018-09-08
飞秒激光制备高敏感度流量传感器 
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Flow Sensor with High Sensitivity Fabricated by Femtosecond Laser
图 & 表
图 1. 弹簧状流量传感器。(a)飞秒激光双光子直写加工系统示意图;(b) 3D弹簧状结构,直径为16 μm,节距为10 μm;(c)芯片实物图
Fig. 1. Spring-like flow sensor. (a) Schematic of femtosecond laser two-photon direct writing fabrication system; (b) 3D spring-like structure with diameter of 16 μm and pitch of 10 μm; (c) physical picture of chip
图 2. 不同圈数的弹簧状结构的显微镜图(直径为16 μm,节距为8 μm)。 (a) 2;(b) 3;(c) 4;(d) 5
Fig. 2. Microscopic images of spring-like structures with diameter of 16 μm and pitch of 8 μm but different numbers of turns. (a) 2; (b) 3; (c) 4; (d) 5
图 3. 不同流速下弹簧状流量传感器伸长状态的显微镜图。(a) 0 nL·min-1;(b) 2.02 nL·min-1;(c) 3.36 nL·min-1;(d) 5.38 nL·min-1
Fig. 3. Microscopic images of elongation states of spring-like flow sensor under different flow rates. (a) 0 nL·min-1; (b) 2.02 nL·min-1; (c) 3.36 nL·min-1; (d) 5.38 nL·min-1
图 4. 多次流速循环对弹簧状流量传感器伸长率的影响
Fig. 4. Effect of multiple flow-rate cycles on elongation rate of spring-like flow sensor
图 5. 弹簧状结构的厚度随飞秒激光曝光能量的变化
Fig. 5. Thickness of spring-like structure versus exposure energy of femtosecond laser
胡文锦, 许兵, 史杨, 胡衍雷, 吴东. 飞秒激光制备高敏感度流量传感器[J]. 中国激光, 2018, 45(9): 0902001. Hu Wenjin, Xu Bing, Shi Yang, Hu Yanlei, Wu Dong. Flow Sensor with High Sensitivity Fabricated by Femtosecond Laser[J]. Chinese Journal of Lasers, 2018, 45(9): 0902001.
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