电子束泵浦准分子激光放大器的双程光路自动准直

王大辉; 赵学庆; 张永生; 孙昱薇; 赵军

doi:doi:10.3788/ope.20122007.1434

光学精密工程, 2012, 20 (7): 1434, 网络出版: 2012-08-09

电子束泵浦准分子激光放大器的双程光路自动准直

Automatic alignment of double paths in electron pumped excimer laser amplifier

论文大纲

王大辉 ^*赵学庆张永生孙昱薇赵军

作者单位

西北核技术研究所激光与物质相互作用国家重点实验室, 陕西西安 710024

激光技术自动准直电子束泵浦准分子激光激光放大器叉丝 laser technology automatic alignment electron pumping excimer laser laser amplifier cross-hair

摘要

提出了一种电子束泵浦准分子激光放大器的双程光路准直方法, 以保证光束在放大器中按照预定方向传输, 并使多路光束稳定精确地照射靶面。首先, 鉴于准分子放大器中无天然准直基准提出了利用双叉丝像传递光路进行准直的方法, 即把输入光束叉丝基准作为“近场点”, 把输出光束叉丝基准作为“远场点”, 并设计了放大器准直光路, 编写了相应的软件。然后, 在现有实验室条件下开展了电子束泵浦准分子激光放大器双程光路的自动准直实验。最后, 分析了影响该方法的相关因素及准直精度。实验及分析表明, 设计的准直系统在较短时间内实现了预定传输光路的自动准直, 系统自身精度为0.63 μrad, 光束最大复位误差为13.75 μm, 满足了电子束泵浦准分子激光放大器双程光路自动准直的要求。

Abstract

A kind of beam automatic alignment method used for double path amplification in an electron pumped excimer laser system was presented to ensure the beams from the amplifiers to transfer in a designed direction and irradiate on a target stably and accurately. As excimer laser amplifiers had no natural alignment references, an image-relaying structure with two cross-hairs was proposed, in which the cross-hair on the input beam was regarded as the near-field reference while the cross-hair of output beam was regarded as the far-field reference. Then, an alignment beam path was designed and the software was compiled. Furthermore, the automatic alignment experiment of double paths in electron pumped excimer laser amplifier was performed and the correlative influence factors and the alignment precision were analysed. Experimental results indicate that the automatic alignment system can achieve the beam transmission given in short time, the accuracy of alignment system is 0.63 μrad and the beam maximum restoration error is 13.75 μm. Obtained results satisfy the demand of beam alignment.

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王大辉, 赵学庆, 张永生, 孙昱薇, 赵军. 电子束泵浦准分子激光放大器的双程光路自动准直[J]. 光学精密工程, 2012, 20(7): 1434. WANG Da-hui, ZHAO Xue-qing, ZHANG Yong-sheng, SUN Yu-wei, ZHAO Jun. Automatic alignment of double paths in electron pumped excimer laser amplifier[J]. Optics and Precision Engineering, 2012, 20(7): 1434.

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