发光学报, 2017, 38 (4): 470, 网络出版: 2017-05-03
利用干涉光刻技术制备LED表面微纳结构
Micro-nano Structures of LED Fabricated by Laser Interference Lithography
补充材料
程俊超, 刘宏伟, 耿照新, 郭凯, 于丹丹, 宁平凡, 李晓云, 张建新. 利用干涉光刻技术制备LED表面微纳结构[J]. 发光学报, 2017, 38(4): 470. CHENG Jun-chao, LIU Hong-wei, GENG Zhao-xin, GUO Kai, YU Dan-dan, NING Ping-fan, LI Xiao-yun, ZHANG Jian-xin. Micro-nano Structures of LED Fabricated by Laser Interference Lithography[J]. Chinese Journal of Luminescence, 2017, 38(4): 470.