中国激光, 2016, 43 (12): 1205001, 网络出版: 2016-12-09
扫描干涉场曝光光束自动对准及其收敛性分析
Beam Alignment and Convergence Analysis of Scanning Beam Interference Lithography Systems
引用该论文
王玮, 巴音贺希格, 宋莹, 姜珊, 潘明忠. 扫描干涉场曝光光束自动对准及其收敛性分析[J]. 中国激光, 2016, 43(12): 1205001.
Wang Wei, Bayanheshig, Song Ying, Jiang Shan, Pan Mingzhong. Beam Alignment and Convergence Analysis of Scanning Beam Interference Lithography Systems[J]. Chinese Journal of Lasers, 2016, 43(12): 1205001.
王玮, 巴音贺希格, 宋莹, 姜珊, 潘明忠. 扫描干涉场曝光光束自动对准及其收敛性分析[J]. 中国激光, 2016, 43(12): 1205001. Wang Wei, Bayanheshig, Song Ying, Jiang Shan, Pan Mingzhong. Beam Alignment and Convergence Analysis of Scanning Beam Interference Lithography Systems[J]. Chinese Journal of Lasers, 2016, 43(12): 1205001.