飞秒激光和酸刻蚀方法制作凹面微透镜阵列
李明, 程光华, 赵卫, 王屹山, 贺俊芳, 陈国夫. 飞秒激光和酸刻蚀方法制作凹面微透镜阵列[J]. 光子学报, 2009, 38(3): 547.
LI Ming, CHENG Guang-hua, WANG Yi-shan, HE Jun-fang, CHEN Guo-fu, ZHAO Wei. Concave Microlens Arrays Produced by Femtosecond Laser With HF Acid Etching[J]. ACTA PHOTONICA SINICA, 2009, 38(3): 547.
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李明, 程光华, 赵卫, 王屹山, 贺俊芳, 陈国夫. 飞秒激光和酸刻蚀方法制作凹面微透镜阵列[J]. 光子学报, 2009, 38(3): 547. LI Ming, CHENG Guang-hua, WANG Yi-shan, HE Jun-fang, CHEN Guo-fu, ZHAO Wei. Concave Microlens Arrays Produced by Femtosecond Laser With HF Acid Etching[J]. ACTA PHOTONICA SINICA, 2009, 38(3): 547.
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