激光与光电子学进展, 2020, 57 (11): 111402, 网络出版: 2020-06-02
飞秒激光微纳加工光纤功能器件研究进展 
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Research Progress on Optical Fiber Functional Devices Fabricated by Femtosecond Laser Micro-Nano Processing
图 & 表
图 1. 自组装纳米光栅在横截面上的SEM图像[42]
Fig. 1. SEM images of self-organized nano-gratings in the transversal cross section of written lines[42]
图 2. 各种悬浮结构(线状、盘状、螺旋体和五边形结构)的SEM图像[43]
Fig. 2. SEM images of various designed suspended structures (line, disk, helix, and pentagon stuctures)[43]
图 3. 各种复杂的三维结构[44]。(a)三层台阶;(b)矩形台阶上的“LASER”;(c)矩形金字塔;(d)凹面微透镜阵列
Fig. 3. Complicated 3D structures[44]. (a) Three-level steps; (b) the word “LASER” on a rectangular step; (c) rectangular pyramid; (d) concave micro lens array
图 5. Nd∶KGW中制备的光波导横截面图[49]。A为波导区域,B为飞秒激光作用后形成的细丝,C为样品中远离飞秒激光辐照区域
Fig. 5. Cross section of optical waveguide fabricated in Nd∶KGW[49]. A is the waveguide area, B is the filament induced by the femtosecond laser, and C is the unprocessed area (bulk) far away from the filament
图 6. 飞秒激光在SMF-NCF-SMF 结构上直写波导[50]
Fig. 6. Femtosecond laser inscription of optical waveguide in SMF-NCF-SMF[50]
图 9. 蓝宝石光纤的横截面和内接四阶SFBG的显微镜图像[38]。(a)直径为60 μm的蓝宝石光纤的横截面;内接四阶SFBG的显微镜图像:(b)俯视图和(c)侧视图
Fig. 9. Microscope images of cross section of sapphire fiber and inscribed fourth-order SFBG[38]. (a) Microscope image of cross section of sapphire fiber with diameter of 60 μm; microscope images of inscribed fourth-order SFBG: (b) top view and (c) side view
图 11. SFBG结构图[6]。(a)俯视图;(b)侧视图
Fig. 11. Photomicrographs of fabricated SFBG[6]. (a) Top view; (b) side view
图 13. 不同扫描方式下相同的微观结构[55]。(a)光栅模式;(b)矢量模式
Fig. 13. Same micro-structures made by different scanning methods[55]. (a) Raster mode; (b) vector mode
图 14. 微腔内聚合物波导结构[32]。(a)微腔内聚合物波导的俯视图; (b)聚合物波导的长度为60 μm; (c)聚合物波导长度为80 μm
Fig. 14. Polymer waveguide integrated in the fibre micro-cavity[32]. (a) Top view of fabricated polymer waveguide integrated in fiber micro-cavity; (b) polymer waveguide with length of 60 μm; (c) polymer waveguide with length of 80 μm
图 15. 液腔FP光纤传感结构制备过程[33]
Fig. 15. Fabrication process diagram of liquid polymer filled-cavity FP fiber sensing structure[33]
图 16. 聚合物光栅光学显微镜图像[58]。(a)清洗前;(b)清洗后
Fig. 16. Optical microscope images of polymerized grating[58]. (a) Before rinsing; (b) after rinsing
图 17. 玻璃中螺旋通道的微观结构[8]。(a)螺旋形微通道示意图;(b)玻璃内部HF酸蚀刻的螺旋形微通道的侧面图; (c)蚀刻样品在600 ℃烘烤4 h后螺旋状微通道的侧视图;(d)热处理后微通道的横截面;(e)通道开口处的横截面
Fig. 17. Microstructure of spiral channels in glass[8]. (a) Diagram of spiral-shaped microchannel; (b) side view of etched spiral-shaped microchannel by HF acid inside glass; (c) side view of spiral-shaped microchannel after baking of etched sample at 600 ℃ for 4 h; (d) cross-section of post baked microchannel; (e) cross-section of channel at the opening area
图 19. 在石英玻璃上制备的复杂螺旋通道[71]。(a)末端有块的螺旋微通道;(b)(c)长度为1 mm的螺旋微通道
Fig. 19. Helical microchannel in quartz glass[71]. (a) Fabricated helical microchannel with block at end of channel; (b)(c) fabricated helical micro channels with length of 1 mm
图 20. 微分流和微混合器结构[72]。(a)空的微混合器;(b)装满水的微型混合器;(c)空的微型分流器;(d)装有水的微型分流器
Fig. 20. Structures of micro diverter and micro mixer[72]. (a) Empty micro mixer; (b) micro mixer filled with water; (c) empty micro diverter; (d) micro diverter filled with water
图 21. 三维微流控芯片[73]。(a)微流控芯片示意图;(b)硅玻璃中制备的微流控芯片
Fig. 21. Three-dimensional microfluidic chip[73]. (a) Diagram of microfluidic chip; (b) fabricated microfluidic chip in silica glass
图 22. 利用飞秒激光诱导水击穿在光纤中制备微通道[74]
Fig. 22. Fabricate micro channels in optic fibers using femtosecond laser-induced water break down[74]
图 23. 具有穿过光纤纤芯的三个微通道的液体折射率传感器的结构图[72]。(a)正视图; (b)俯视图;(c)光纤顶部的微通道的开口;(d)光纤底部的微通道的开口
Fig. 23. Structures of liquid refractive index sensor with three micro channels across fiber core[72]. (a) Front view; (b) top view; (c) opening of microchannel on the top of fiber; (d) opening of microchannel on the bottom of fiber
图 24. 在单模光纤上制备的H型湿度传感器结构[76]。(a)两个垂直微通道正好穿过纤芯的俯视图;(b)在第一步中制作的两个垂直微通道正好穿过SMF光纤芯的侧视图;(c) SMF中H型微通道的俯视图;(d) SMF中H型微通道的侧视图
Fig. 24. H-type humidity sensor in SMF[76]. (a) Top view of fabricated two vertical micro channels rightly across fiber core; (b) side view of fabricated two vertical micro channels rightly across fiber core in SMF in the first step; (c) top view of fabricated H-type microchannel in SMF; (d) side view of fabricated H-type microchannel in SMF
图 25. 利用飞秒激光诱导的水击穿技术在SMS光纤结构中制备MZ干涉型微腔[78]。(a)将一段多模光纤拼接在两段SMF之间;(b) SMS结构; (c)飞秒激光诱导水击穿法制造SMS微腔的装置;(d)激 光聚焦的扫描轨迹;(e) SMS中制作的微腔
Fig. 25. MZ interferometer microcavity in SMS fiber structure by femtosecond laser-induced water breakdown[78]. (a) A section of multi mode fiber was spliced between two sections of the SMF; (b) structure of SMS; (c) setup for fabricating microcavity in SMS by femtosecond laser-induced water breakdown; (d) scanning track of laser focus; (e) fabricated microcavity in SMS
李金健, 刘一, 曲士良. 飞秒激光微纳加工光纤功能器件研究进展[J]. 激光与光电子学进展, 2020, 57(11): 111402. Jinjian Li, Yi Liu, Shiliang Qu. Research Progress on Optical Fiber Functional Devices Fabricated by Femtosecond Laser Micro-Nano Processing[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111402.
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