光学 精密工程, 2012, 20 (1): 58, 网络出版: 2012-02-14
准分子激光相位掩模法制备大晶粒尺寸多晶硅薄膜
Fabrication of large grain size p-Si film by phase modulated excimer laser crystallization
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张健, 林广平, 张睿, 崔国宇, 李传南. 准分子激光相位掩模法制备大晶粒尺寸多晶硅薄膜[J]. 光学 精密工程, 2012, 20(1): 58. ZHANG Jian, LIN Guang-ping, ZHANG Rui, CUI Guo-yu, LI Chuan-nan. Fabrication of large grain size p-Si film by phase modulated excimer laser crystallization[J]. Optics and Precision Engineering, 2012, 20(1): 58.
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