一种步进扫描投影光刻机承片台不平度检测新技术
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何乐, 王向朝, 王帆, 施伟杰, 马明英. 一种步进扫描投影光刻机承片台不平度检测新技术[J]. 光学学报, 2007, 27(7): 1205. 何乐, 王向朝, 王帆, 施伟杰, 马明英. Novel in-Situ Non-Flatness Measurement Method of Wafer Chuck in Step-and-Scan Lithographic Tool[J]. Acta Optica Sinica, 2007, 27(7): 1205.