激光与光电子学进展, 2018, 55 (1): 011410, 网络出版: 2018-09-10
3D飞秒激光纳米打印 
下载： 2616次特邀综述
3D Femtosecond Laser Nanoprinting
图 & 表
图 1. 双光子聚合的基本原理[48]。 (a)双光子聚合加工示意图;(b)亚衍射极限加工精度的实现[单光子吸收(SPA)和双光子吸收的概率分别用虚线和实线标识,插入图为衍射图样]
Fig. 1. Basics of two-photon photopolymerization (TPP)[48]. (a) Schematic of TPP fabrication; (b) achievement of sub-diffraction-limit (SDL) fabrication accuracy [the absorption probabilities of single photo absorption (SPA) and TPA are denoted by dashed and solid lines, respectively; the inset is a diffraction pattern]
图 3. 3D飞秒激光纳米打印加工的各种微纳结构。(a)利用光栅扫描加工的微米牛雕塑[23];(b)利用生物光刻胶聚合加工的微米盆[49];(c)利用动态激光成型加工的仿生三维多层褶皱微结构[56];(d)将CdTe量子点图案化后的校徽图样[57]
Fig. 3. Micro-nanostructures fabricated via 3D FsLNP. (a) Micro-bull sculpture by raster scanning[23]; (b) micro-basin developed from a bio-photoresist[49]; (c) 3D biomimetic lamellate wrinkle structure developed from a hydrogel[56]; (d) university badge pattern assembled from CdTe quantum dots[57]
图 4. 利用3D飞秒激光纳米打印加工的曲率变化的聚合物微透镜阵列(MLADC)的示意图和扫描电子显微镜(SEM)图像。(a)透视图;(b)截面图和相应的聚焦焦面(曲面);(c)俯视SEM图像;(d)侧视SEM图像[67]
Fig. 4. Schematics and SEM images of microlens arrays with different curvature units (MLADC) fabricated via 3D FsLNP. (a) Schematic of perspective view; (b) schematic of cross-section view as well as the focal plane; (c) SEM image shot from top; (d) SEM image shot from side[67]
图 5. 利用3D飞秒激光纳米打印在窄带滤光片衬底上加工的各种形状的微腔激光器的俯视图像[68]。(a)圆盘;(b)圆环;(c)螺旋盘;(d)堆叠于圆环上方的螺旋环;(e)堆叠于圆盘上方的螺旋环
Fig. 5. Top-view SEM micrographs of the microlasers with different shapes fabricated via 3D FsLNP on the narrow band filter substrate[68]. (a) Circular disk; (b) circular ring; (c) spiral ring; (d) spiral ring stacked on circular ring; (e) spiral ring stacked on circular disk
图 6. 利用多种蚕丝墨水进行3D飞秒激光纳米打印[49]。(a)提取后的蚕丝蛋白的照片,插图为原材料桑蚕茧;(b)可再生蚕丝蛋白的母液照片(质量分数为3%);(c)多种蚕丝墨水[(I)可再生蚕丝蛋白/亚甲蓝水溶液,(II)可再生蚕丝蛋白/Ag纳米种子水溶液,(III)可再生蚕丝蛋白/AgNO3水溶液,(IV)可再生蚕丝蛋白/HAuCl4水溶液];(d) 3D飞秒激光多光子纳米打印示意图;(e)采用可再生蚕丝蛋白/亚甲蓝墨水所打印的微米单词“silk”的SEM图像,比例尺为10 mm;(f)采用可再生蚕丝蛋白/AgNO3墨水打印的蚕丝/Ag墨水复合物微米线的SEM图像,比例尺为10 mm(插图比例尺为1 mm);(g)采用可再生蚕丝蛋白/HAuCl4墨水打印的蚕丝/Au墨水复合物微米线的SEM图像,比例尺为10 mm(插图比例尺为2 mm)
Fig. 6. 3D FsLNP using diversiform silk-based aqueous inks[49]. (a) Image of silk fibroin extracted from Bombyx mori silkworm cocoons in the inset; (b) image of renewable silk fibroin (RSF) aqueous mother solution (mass fraction of 3%); (c) diversiform silk-based aqueous inks [(I) RSF/MB aqueous solution, (II) RSF/Ag nanoseed aqueous solution, (III) RSF/AgNO3 aqueous solution, (IV) RSF/HAuCl4 aqueous solution]; (d) schematic
图 7. 利用3D飞秒激光纳米打印加工的蛋白质多模干涉微分光器[88]。(a) 3D飞秒激光打印加工示意图; (b)在MgF2衬底上加工完毕的蛋白质多模干涉微分光器的光学显微镜照片,比例尺为10 μm
Fig. 7. Protein-based multi-mode interference (MMI) optical micro-splitters via 3D FsLNP[88]. (a) Schematic of 3D FsLNP of protein-based MMI micro-splitters; (b) optical microscopic image of protein-based MMI micro-splitters prepared on MgF2 substrate, the scale bar is 10 μm
图 8. 天然复眼和3D飞秒激光纳米打印结合像素扫描技术加工的高质量仿生人工复眼[89]。天然复眼的(a)俯视和(b)局部放大SEM图像,其结构包含1个宏观底座和几百个100%填充的六边形微型小眼;仿生人工复眼的(c)俯视和(d)30°倾角局部放大SEM图像,其100%的填充度与图8 (b)中的天然复眼相当;人工复眼的成像表征,即用人工复眼分别对字母(e) “P”和(f) “L”成像
Fig. 8. Natural compound eye and high quality artificial compound eye via 3D FsLNP combined with the high-speed voxel-modulation laser scanning method[89]. (a) Top-view and(b) magnified SEM images of a natural compound eye showing a macrobase and hundreds of 100% filled hexagonal micro-ommatidia; (c) top-view and (d) 30°-tilted magnified SEM images of the bio-inspired artificial compound eye, the 100% fill factor of hexagonal ommatidia is comparable to t
表 13D飞秒激光纳米打印技术与3D激光打印技术的对比
Table1. Comparison between 3D FsLNP and 3D laser printing
|
刘墨南, 李木天, 孙洪波. 3D飞秒激光纳米打印[J]. 激光与光电子学进展, 2018, 55(1): 011410. Liu Monan, Li Mutian, Sun Hongbo. 3D Femtosecond Laser Nanoprinting[J]. Laser & Optoelectronics Progress, 2018, 55(1): 011410.
PDF全文
