Collection Of theses on high power laser and plasma physics, 2013, 11 (1): 0508001, Published Online: Jun. 2, 2017  

Smart and Quantitative Near-Infrared Point-Diffraction Interferometer Based on the Self-Referencing Wavefront Sensor

Author Affiliations
1 中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800
2 中国科学院大学, 北京 100049
3 德国马普天文所, Knigstuhl 17, D-69117 Heidelberg, 德国
Abstract
This paper describes the development of a novel infrared point-diffraction interferometer (IPDI), which can be readily applied to real-time quantitative phase measurement. We generate reference wave with the help of Michelson-like unit combined with a low-pass spatial filter, and extract the phase information using windowed Fourier transform algorithm from single off-axis fringes. The arrangement of the proposed setup offers a quasi-common-path geometry, which could significantly minimize the systematic errors. The proposed method of IPDI is effective and sufficient for the dynamic process measurement of small deformation with higher spatial resolution compared with the conventional off-axis scheme. The feasibility of the proposed setup is demonstrated, followed by methods of reconstruction and system calibration. The nanoscale repeatability is achieved in our experiment.
References

[1] R. N. Smartt, W. H. Steel. Theory and application of point diffraction interferometers [J]. Jpn. J. Appl. Phys., 1975, 14(1): 351~356

[2] Osuk Y. Kwon. Multichannel phase-shifted interferometer [J]. Opt. Lett., 1984, 9(2): 59~61

[3] Guiying Wang, Yanling Zheng, Aimin Sun et al.. Polarization pinhole interferometer [J]. Opt. Lett., 1991, 16(17): 1352~1354

[4] Mark J. Guardalben, Lutao Ning, Nieraj Jain et al.. Experimental comparison of a liquid-crystal point-diffraction interferometer (LCPDI) and a commercial phase-shifting interferometer and methods to improve LCPDI accuracy [J]. Appl. Opt., 2002, 41(7): 1353~1365

[5] Sang Hun Lee, Patrick Naulleau, Kenneth A. Goldberg et al.. Phase-shifting point-diffraction interferometry at 193 nm [J]. Appl. Opt., 2000, 39(31): 5768~5772

[6] Robert M. Neal, James C. Wyant. Polarization phase-shifting point-diffraction interferometer [J]. Appl. Opt., 2006, 45(15): 3463~3476

[7] Peng Gao, Irina Harder, Vanusch Nercissian et al.. Phase-shifting point-diffraction interferometry with common-path and in-line configuration for microscopy [J]. Opt. Lett., 2010, 35(5): 712~714

[8] Gabriel Popescu, Takahiro Ikeda, Ramachandra R. Dasari et al.. Diffraction phase microscopy for quantifying cell structure and dynamics [J]. Opt. Lett., 2006, 31(6): 775~777

[9] C. Joenathan, G. Pedrini, I. Alekseenko et al.. Novel and simple lateral shear interferometer with holographic lens and spatial Fourier transform [J]. Opt. Eng., 2012, 51(7): 075601

[10] Matt Novak, James Millerd, Neal Brock et al.. Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer [J]. Appl. Opt., 2005, 44(32): 6861~6868

[11] Chenguang Zhao, Jiubin Tan, Jianbo Tang et al.. Confocal simultaneous phase-shifting interferometry [J]. Appl. Opt., 2011, 50(5): 655~661

[12] Rongli Guo, Baoli Yao, Peng Gao et al.. Reflective point-diffraction microscopic interferometer with long-term stability [J]. Chin. Opt. Lett., 2011, 9(12): 120002

[13] S. Kendrew, S. Hippler, W. Brandner et al.. GRAVITY coudé infrared adaptive optics (CIAO) system for the VLT interferometer [C]. SPIE, 2012, 8446: 84467W

[14] K. Otaki, T. Yamamoto, Y. Fukuda et al.. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror [J]. J. Vac. Sci. Technol. B, 2002, 20(1): 295~300

[15] P. Yang, S. Hippler, C. P. Deen et al.. Optimizing the transmission of the GRAVITY/VLTI near-infrared wavefront sensor [C]. SPIE, 2012, 8445: 844531

[16] K. Qian. Windowed Fourier transform method for demodulation of carrier fringes [J]. Opt. Eng., 2004, 43(7): 1472~1473

[17] Jan Herrmann. Least-squares wave front errors of minimum norm [J]. J. Opt. Soc. Am., 1980, 70(1): 28~35

Yang Pengqian, Stefan Hippler, Casey Deen, Wolfgang Brandner, Sarah Kendrew, Miao Jie, Zhang Yanli, Zhu Jianqiang. Smart and Quantitative Near-Infrared Point-Diffraction Interferometer Based on the Self-Referencing Wavefront Sensor[J]. Collection Of theses on high power laser and plasma physics, 2013, 11(1): 0508001.

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