中国激光, 2018, 45 (7): 0701003, 网络出版: 2018-09-11
基于准分子激光绝对波长校准的寻峰算法研究 下载: 1105次
Research of Peak-Detection Algorithm Based on Absolute Wavelength Calibration of Excimer Laser
图 & 表
图 1. 高斯非线性拟合寻峰算法流程
Fig. 1. Flow chart of Gaussian nonlinear curve fitting peak-detection algorithm
图 3. 1000 Hz频率下校准单元所测Pt吸收谱线
Fig. 3. Pt absorption line measured in 1000 Hz by the calibration unit
图 4. 强度阈值对各寻峰算法误差的影响。(a)质心探测寻峰法;(b)一般多项式拟合;(c)高斯-多项式拟合;(d)高斯拟合;(e)高斯非线性曲线拟合法
Fig. 4. Influence of power threshold upon error of different algorithms. (a) Centroid detection algorithm; (b) polynomial fitting; (c) Gaussian-polynomial fitting; (d) Gaussian fitting; (e) Gaussian nonlinear curve fitting
表 1各寻峰算法仿真及实验误差
Table1. Simulations and experimental errors of each peak-detection algorithmpm
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表 2各寻峰算法最小误差及对应的最佳强度阈值
Table2. Minimum error and optimum intensity threshold of each peak-detection algorithm
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袁靖超, 赵江山, 李慧, 刘广义. 基于准分子激光绝对波长校准的寻峰算法研究[J]. 中国激光, 2018, 45(7): 0701003. Jingchao Yuan, Jiangshan Zhao, Hui Li, Guangyi Liu. Research of Peak-Detection Algorithm Based on Absolute Wavelength Calibration of Excimer Laser[J]. Chinese Journal of Lasers, 2018, 45(7): 0701003.