强激光与粒子束, 2005, 17 (11): 1665, 网络出版: 2006-04-28   

采用分步迭代算法设计制作衍射光学元件

Design of diffractive optical elements by step iterative algorithm
作者单位
中国科学技术大学物理系,安徽,合肥,230026
摘要
结合均匀照明相位器件的设计实例,介绍最新提出的基于迭代框架的优化方法,并应用该方法设计制作了16台阶的衍射光学元件并对其进行了测试,验证了设计原理及方法的正确性,且对加工中可能出现的误差进行了分析和讨论.测试结果验证了采用多台阶相位结构的设计方案能有效提高工艺宽容度.
Abstract
A new method was used to design diffractive optical elements(DOE) based on improved iterative algorithm.This method shortened the computing time tremendously and the aberration factor of the design was about 8.4%.A DOE with 16 steps construction and quantized phase was fabricated with ion beam moving etching technology.Test results showed that the aberration factor was about 19% which proved the feasibility of the algorithm.The machining error in DOE was analyzed.
参考文献

[1] Kutay M A, Ozoktas H W. Optimal filtering in fractional Fourier domains[J]. IEEE Trans Sign Proces, 1997, 45(5):1129-1143.

[2] Gerchberg R W, Saxton W O. A practical algorithm for the determination of phase from image and diffraction plane pictures[J]. Optik, 1972, 35(2):237-246.

[3] Dixit S N, Lawson J K, Manes K R, et al. Kinoform phase plates for focal plane irradiance profile control[J]. Opt Lett, 1994, 19(6):417-419.

[4] Bett T H. Stevenson R M, Taghizadeh M R, et al. Diffractive optic development for application on high-power solid state lasers[A]. Proc of SPIE[C]. 1995, 2633:129-140.

[5] Lin Y, Kessler T J, Lawrence G N. Distributed phase plates for super-Gaussian focal plane irradiance profiles[J]. Opt Lett, 1995, 20(7):764-771.

[6] 王炜, 李涛, 刘力, 等. 用于ICF的大尺寸位相元件的设计[J]. 中国激光, 1999, 26(5):395-399.
Wang W, Li T, Liu L, et al. Design of large-caliber phase element used in ICF. Chinese Journal of Lasers, 1999, 26(5):395-399

[7] Goodman J W. Introduction to Fourier Optics[M]. New York: McGraw-Hill,1968.

[8] Fienup J R. Iterative method applied to image reconstruction and to computer-generated holograms[J]. Optical Engineering, 1980, 19(3):297-305.

[9] Deng X G, Li Y P, Qiu Y, et al. Phase-mixture algorithm applied to design of pure phase elements[J]. Chinese Journal of Lasers, 1995, B4(5):447-454.

张巍, 张晓波, 舒方杰, 李永平. 采用分步迭代算法设计制作衍射光学元件[J]. 强激光与粒子束, 2005, 17(11): 1665. ZHANG Wei, ZHANG Xiao-bo, SHU Fang-jie, LI Yong-ping. Design of diffractive optical elements by step iterative algorithm[J]. High Power Laser and Particle Beams, 2005, 17(11): 1665.

本文已被 5 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!