光子学报, 2012, 41 (12): 1488, 网络出版: 2012-12-24
基于F-P腔干涉的膜片式光纤微机电系统压力传感器
Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference
图 & 表
郑志霞, 黄元庆. 基于F-P腔干涉的膜片式光纤微机电系统压力传感器[J]. 光子学报, 2012, 41(12): 1488. ZHENG Zhi-xia, HUANG Yuan-qing. Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference[J]. ACTA PHOTONICA SINICA, 2012, 41(12): 1488.