基于F-P腔干涉的膜片式光纤微机电系统压力传感器
[1] 何慧灵,赵春梅,陈丹,等.光纤传感器现状[J].激光与光电子学进展,2004,41(3):39-41.
[3] 江俊峰.用于结构健康监测的光纤传感解调系统的理论与方法研究[D].天津:天津大学,2004.
JIANG Jun-feng. A research on theory and technique of demodulation of optical fiber sensors used for structure health monitoring[D]. Tianjin: Tianjin University, 2004.
[4] 于清旭,王晓娜,宋世德,等.光纤F-P腔压力传感器在高温油井下的应用研究[J].光电子·激光,2007,18(3):299-302.
YU Qing-xu, WANG Xiao-na, SONG Shi-de,et al. Fiber optic pressure sensor system based on extrinsic fabry-perot interferometer for high temperature oil well measurement [J].Journal of Optic electronics Laser, 2007, 18(3): 299-302.
[5] 吴易明,李明,程光华.飞秒激光制造微型光纤法布里-珀罗干涉传感器[J].光子学报,2010,39(4):585-587.
WU Yi-ming, LI Ming, CHENG Guang-hua. Fabricating micro fiber Fabry-Perot sensor with femtosecond laser pulses[J]. Acta Photonic Sinica, 2010, 39(4): 585-587.
[6] 郭振武,孙桂玲,李维祥.F-P光纤压力传感器的温度特性研究[J].半导体光电,2008, 29(3):418-421.
GUO Zhen-wu, SUN Gui-ling, LI Wei-xiang. Temperature characteristics of optical fiber pressure sensor based on F-P interferometry[J]. Semiconductor Opticelectronics, 2008, 29(3): 418-422.
[7] ZHANG T, QIANG S, LEWIS F, et al. An optical pressure sensor based on MEMS[J]. Rare Metal Materials and Engineering, 2006, 35(3): 476-478.
[8] HILL G C, MELAMUD R, DECLERCQ F E, et al. SU-8 MEMS Fabry-Perot pressure sensor[J]. Sensors and Actuators A, 2007, 138(1): 52-62.
[9] 于清旭,贾春艳.膜片式微型F-P腔光纤压力传感器[J].光学精密工程,2009,17(12):2887-2892.
YU Qing-xu, JIA Chun-yan. Diaphragm based miniature f iber optic pressure sensor with F-P cavity[J]. Optics and Precision Engineering, 2009, 17(12): 2887-2891.
[10] 冯勇建.MEMS高温接触式电容压力传感器[J].仪器仪表学报,2006,27(7):804-807.
FENG Yong-jian. MEMS high temperature touch-mode capcitive pressure sensor[J]. Chinese Journal of Scientific Instrument, 2006, 27(7): 804-807.
[11] 郑志霞,冯勇建.高机械灵敏度悬空导电薄膜的制备方法研究[J].厦门大学学报,2012,51(1):51-54.
ZHENG Zhi-xia, FENG Yong-jian. Research on the preparation method of free-handing conductive membrane with high mechanical sensitivity[J]. Journal of Xiamen University, 2012, 51(1): 51-54.
[12] 姜丽娟,江俊峰,刘铁根,等.具有复合式法布里腔的光腔压力传感器的解调[J].光子学报,2012,41(3):283-287.
[13] 陈绪兴,王鸣,戎华,等.台面结构硅基法珀型光纤MEMS压力传感器的研究[J].传感技术学报,2007,20(4):820-823.
CHEN Xu-xing, WANG Ming, RONG Hua, et al. The study of the optical fiber mems pressure sensor with a mesa structure diaphragm[J]. Chinese Journal of Sensors and Actuators, 2007,20(4): 819-823.
[14] 崔峰,肖奇军,吴校生,等.Pyrex玻璃金属化凹坑的湿法腐蚀[J].功能材料与器件学报,2008,14(1):236-238.
CUI Feng, XIAO Qi-jun, WU Xiao-sheng, et al. Wet etching pits of pyrex glass for metallization[J]. Journal of Functional Materials and Devices, 2008, 14(1): 236-238.
郑志霞, 黄元庆. 基于F-P腔干涉的膜片式光纤微机电系统压力传感器[J]. 光子学报, 2012, 41(12): 1488. ZHENG Zhi-xia, HUANG Yuan-qing. Diaphragm Type Optical Fiber MEMS Pressure Sensors Based on F-P Cavity Interference[J]. ACTA PHOTONICA SINICA, 2012, 41(12): 1488.