Silicon photonic platforms for mid-infrared applications [Invited]

Ting Hu; Bowei Dong; Xianshu Luo; Tsung-Yang Liow; Junfeng Song; Chengkuo Lee; Guo-Qiang Lo

doi:doi:10.1364/PRJ.5.000417

Photonics Research, 2017, 5 (5): 05000417, Published Online: Aug. 31, 2017

Silicon photonic platforms for mid-infrared applications [Invited] Download： 1118次

Ting Hu ¹Bowei Dong ^1,2Xianshu Luo ^1,*Tsung-Yang Liow ¹Junfeng Song ¹Chengkuo Lee ²Guo-Qiang Lo ¹

Author Affiliations

¹ Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, #08-02, Innovis, Singapore 138634, Singapore

² Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117583, Singapore

Figures & Tables

Fig. 1. Material absorption characteristic in the MIR range [1,3]. Gray region represents the optical transparency; black area denotes the high loss. Absorption peaks of some detected gases and the fingerprint region are marked.

下载图片查看原文

Fig. 2. (a) Fabricated 8-in. silicon wafer with MIR devices after wafer dicing for characterization. (b) SOI strip ring resonators and rib DCs. (c) SOI strip DCs, bends, waveguides, and rib waveguides. (d)–(k) SEM images of the fabricated devices. (d) SOI waveguide taper tip. (e) SOI strip waveguide. (f) SOI rib waveguide. (g) SOI rib DC. (h) SOI strip to rib converter. (i) SOI strip DC array. (j) SNOI DC. (k) SNOI add–drop ring resonator.

下载图片查看原文

Fig. 3. Loss characterization of SOI waveguide. (a) Propagation loss of SOI strip waveguide. (b) Bending loss of SOI strip waveguide. (c) Propagation loss of SOI rib waveguide. Insets in (a) and (c) show the corresponding mode field simulated by the commercial software Lumerical FDTD.

下载图片查看原文

Fig. 4. Characterization of SOI strip and rib DCs. (a) and (c) Self-normalized transmitted and coupled power of (a) strip and (c) rib DCs. Solid lines show sine squared fitting of the data with adjusted R-square of 0.997. (b) and (d) Power coupling coefficient K of (b) strip and (d) rib DCs. Insets show the linear fitting of Y with respect to Lc with the extracted parameters Lπ and Ø0.

下载图片查看原文

Fig. 5. Characterization of SOI strip racetrack resonators. Red dots present measurement data, while the blue solid lines show fitting results. (a) and (c) Transmission spectra of the racetrack resonator with (a) r=5 μm, g=500 nm, and Lc=50 μm, (c) r=5 μm, g=550 nm, and Lc=10 μm. (b) and (d) Zoom-in of a particular resonating wavelength at ∼3687 nm in (a) and ∼3824 nm in (c) as indicated by the navy blue square box.

下载图片查看原文

Fig. 6. Loss characterization of SNOI waveguide. (a) Propagation loss of SNOI strip waveguide. (b) Bending loss of SNOI strip waveguide. Inset in (a) shows the mode field simulated by Lumerical.

下载图片查看原文

Fig. 7. Characterization of the SNOI strip ring resonator with radius of 20 μm and coupling gap of 550 nm. Transmission spectrum of the ring resonator (a) from 1960 to 2045 nm with scanning step of 0.54 nm (b) around the resonance of 1988 nm with scanning step of 0.011 nm.

下载图片查看原文

Fig. 8. CO2 gas sensors based on MIR photonics. Sensor configuration with the (a) spiral waveguide and (c) MRR. (b) Detected optical power variation versus CO2 concentration of the sensor shown in (a). (d) Q-factor variation and effective gas interaction length varying with CO2 concentration of the sensor shown in (b).

下载图片查看原文

Table1. Demonstrated MIR Waveguides with Various Platforms

No.	Platform	Structure Type	Cross-Section Size (μm×μm)	Working Wavelength (μm)	Loss (dB/cm)	Pol.	Year	Ref.
1	SOI	Strip	$0.9 \times 0.22$	2.1	0.6	TE	2012	[5]
2	SOI	Rib	$0.9 \times 0.34$ ( $H_{slab} = 0.1$ )	2	1	TE	2016	[6]
3	SOI	Rib	$2 \times 2$ ( $H_{slab} = 0.8$ )	3.39	0.6–0.7	TE/TM	2011	[7]
4	SOI	Rib	$2 \times 2$ ( $H_{slab} = 0.8$ )	3.73	$1.5 \pm 0.2$	TE	2012	[8]
5		Rib	$2 \times 2$ ( $H_{slab} = 0.8$ )	3.8	$1.8 \pm 0.3$
6		Strip	$1 \times 0.5$	3.74	$4.6 \pm 1.1$
7	SOI	Suspended Rib	$1 \times 0.34$ ( $H_{slab} = 0.1$ )	2.75	$3 \pm 0.7$	TE	2012	[9]
8	SOI	Rib	$1.35 \times 0.38$ ( $H_{slab} = 0.22$ )	3.76	5.3	TE	2013	[10]
9	SOI	Strip	$1.35 \times 0.4$	3.76	3.1	TE	2013	[10]
10	SOI	Slot	$0.65 \times 0.5$ , ( $gap = 0.078$ μm)	3.8	$1.4 \pm 0.2$	Slot Mode	2015	[11]
11	SOI	Strip	$4 \times 2.3$	3-4	$< 1$	TE	2017	[12]
12	SOI	Strip	$1.2 \times 0.4$	3.75	$2.65 \pm 0.08$	TE	2017	[13]
13	SOI	Rib	$1.2 \times 0.4$ ( $H_{slab} = 0.16$ )	3.75	$1.75 \pm 0.22$	TE	2017	[13]
14	GOS	Strip	$2.9 \times 2$	5.8	2.5	TM	2012	[32]
15	GOS	Rib	$2.7 \times 2.9$ , ( $H_{slab} = 1.2$ )	3.8	0.6	TE	2015	[33]
16	GOI	Strip	$6.5 \times 0.85$	3.682	$\sim 8$	TE/TM	2016	[34]
17	GOI	Strip	$5.5 \times 0.85$	3.682	$\sim 10$	TE/TM	2016	[35]
18	GOI	Rib	$0.6 \times 0.22$ ( $H_{slab} = 0.05$ )	2	14	TE	2016	[36]
19	GOSN	Strip	$2 \times 1$	3.8	$3.35 \pm 0.5$	TE	2016	[37]
20	SOSN	Rib	$2 \times 2$ ( $H_{slab} = 0.8$ )	3.39	$\sim 5 \pm 0.6$	TE/TM	2013	[38]
21	SOS	Strip	$1.8 \times 0.6$	4.5	$4.3 \pm 0.6$	TE	2010	[39]
22	SOS	Strip	$1 \times 0.29$	5.18	1.92	TE	2011	[40]
23	SGOS	Strip	$3.3 \times 3$	4.5	1	TM	2014	[41]
24	SGOS	Strip	$7 \times 3$	7.4	2	TM	2014	[41]

查看原文

Table2. Demonstrated MIR MRRs with Various Platforms

No.	Platform	Bending Radius (μm)	Working Wavelength (μm)	Maximum $Q$ -Factors (a.u.)	ER (dB)	FSR (nm)	Pol.	Year	Ref.
1	SOI	100	3.74	8200	4–9	4.12	TE	2012	[8]
2	SOI	40	2.75	8100	NA	NA	TE	2012	[9]
3	SOI	NA	3.5–3.8	$\sim 10^{6}$	$\sim 6.6$	NA	TE	2017	[12]
4	SOI	$\sim 17.5$	5.2	2700	NA	NA	TE	2013	[14]
5	SOI	$\sim 17.5$	3.4	7900	NA	NA	TE	2013	[14]
6	SOI	20, 30, 40	3.7–3.8	2900	$\sim 25$	5.33	TE	2014	[17]
7	GOS	52, 142, 149	$\sim 3.8$	1672	17.46	7.7	TE	2016	[18]
8	SOS	40	5.4–5.6	3000	NA	29.7	TE	2010	[51]
9	SOS	150	2.75	$11400 \pm 800$	NA	NA	TE	2012	[52]
10	SOS	60	4.4–4.6	$1.51 \times 10^{5}$	NA	12.4	NA	2013	[53]

查看原文

Ting Hu, Bowei Dong, Xianshu Luo, Tsung-Yang Liow, Junfeng Song, Chengkuo Lee, Guo-Qiang Lo. Silicon photonic platforms for mid-infrared applications [Invited][J]. Photonics Research, 2017, 5(5): 05000417.

Silicon photonic platforms for mid-infrared applications [Invited] Download： 1118次

Fig. 1. Material absorption characteristic in the MIR range [1,3]. Gray region represents the optical transparency; black area denotes the high loss. Absorption peaks of some detected gases and the fingerprint region are marked.

Fig. 3. Loss characterization of SOI waveguide. (a) Propagation loss of SOI strip waveguide. (b) Bending loss of SOI strip waveguide. (c) Propagation loss of SOI rib waveguide. Insets in (a) and (c) show the corresponding mode field simulated by the commercial software Lumerical FDTD.

Fig. 6. Loss characterization of SNOI waveguide. (a) Propagation loss of SNOI strip waveguide. (b) Bending loss of SNOI strip waveguide. Inset in (a) shows the mode field simulated by Lumerical.

Fig. 7. Characterization of the SNOI strip ring resonator with radius of 20 μm and coupling gap of 550 nm. Transmission spectrum of the ring resonator (a) from 1960 to 2045 nm with scanning step of 0.54 nm (b) around the resonance of 1988 nm with scanning step of 0.011 nm.

Table1. Demonstrated MIR Waveguides with Various Platforms

Table2. Demonstrated MIR MRRs with Various Platforms

关于本站 Cookie 的使用提示

全站搜索

Silicon photonic platforms for mid-infrared applications [Invited] Download： 1118次

Fig. 1. Material absorption characteristic in the MIR range [1,3]. Gray region represents the optical transparency; black area denotes the high loss. Absorption peaks of some detected gases and the fingerprint region are marked.

Fig. 3. Loss characterization of SOI waveguide. (a) Propagation loss of SOI strip waveguide. (b) Bending loss of SOI strip waveguide. (c) Propagation loss of SOI rib waveguide. Insets in (a) and (c) show the corresponding mode field simulated by the commercial software Lumerical FDTD.

Fig. 6. Loss characterization of SNOI waveguide. (a) Propagation loss of SNOI strip waveguide. (b) Bending loss of SNOI strip waveguide. Inset in (a) shows the mode field simulated by Lumerical.

Fig. 7. Characterization of the SNOI strip ring resonator with radius of 20 μm and coupling gap of 550 nm. Transmission spectrum of the ring resonator (a) from 1960 to 2045 nm with scanning step of 0.54 nm (b) around the resonance of 1988 nm with scanning step of 0.011 nm.

Table1. Demonstrated MIR Waveguides with Various Platforms

Table2. Demonstrated MIR MRRs with Various Platforms

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索