中国激光, 2017, 44 (4): 0402003, 网络出版: 2017-04-10
激光诱导背向湿式刻蚀蓝宝石过程中声发射信号检测试验
Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire
引用该论文
罗志良, 谢小柱, 魏昕, 胡伟, 任庆磊, 江伟. 激光诱导背向湿式刻蚀蓝宝石过程中声发射信号检测试验[J]. 中国激光, 2017, 44(4): 0402003.
Luo Zhiliang, Xie Xiaozhu, Wei Xin, Hu Wei, Ren Qinglei, Jiang Wei. Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire[J]. Chinese Journal of Lasers, 2017, 44(4): 0402003.
罗志良, 谢小柱, 魏昕, 胡伟, 任庆磊, 江伟. 激光诱导背向湿式刻蚀蓝宝石过程中声发射信号检测试验[J]. 中国激光, 2017, 44(4): 0402003. Luo Zhiliang, Xie Xiaozhu, Wei Xin, Hu Wei, Ren Qinglei, Jiang Wei. Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire[J]. Chinese Journal of Lasers, 2017, 44(4): 0402003.