红外与激光工程, 2015, 44 (3): 1048, 网络出版: 2016-01-26   

光学薄膜参数测量方法研究

Study on optical thin film parameters measurement method
作者单位
兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000
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李凯朋, 王多书, 李晨, 王济州, 董茂进, 张玲. 光学薄膜参数测量方法研究[J]. 红外与激光工程, 2015, 44(3): 1048.

Li Kaipeng, Wang Duoshu, Li Chen, Wang Jizhou, Dong Maojin, Zhang Ling. Study on optical thin film parameters measurement method[J]. Infrared and Laser Engineering, 2015, 44(3): 1048.

参考文献

[1] Ulrich R, Torge R.Measurement of thin film parameters with a prism coupler[J]. Applied Optics, 1973, 12(12):2901-2980.

[2] Bhattacharyya D, Sahoo N K, Thakur S, et al. Spectroscopic ellipsometry of TiO2 layers prepared by ion-assisted electron-beam evaporation[J]. Thin Solid Films(S0040-6090), 2000, 360(1/2): 96-102.

[3] Ji Yiqin, Liu Huasong, Zhang Yanmin. Test and analysis of optical film constants[J]. Infrared and Laser Engineering, 2006, 35(5): 513-518. (in Chinese)

[4] Chen Yanping, Yu Feihong. Test methods for film thickness and optical constants[J]. Optical Instruments, 2006, 28(6): 84-88. (in Chinese)

[5] Xie Yi, Chen Qian, Liu Yong. Determination of the optical constants and thickness of thin film by improved flexible tolerance method[J]. Infrared and Laser Engineering, 2007, 36(4): 521-525. (in Chinese)

[6] Dirk Perlman, Philippe Frederic Smet. Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review [J]. Appl Phys, 2003, 3(6): 1850-1857.

[7] Yao Xilin, Tong Nanchun, Xiong Changxin. New methods for determining optical constants of thin films from single measurements[J]. Optical Design and Testing II, 2005, 5638(140): 1088 -1099. (in Chinese)

[8] Zhou Tianyu, Yang Kaiyong, Wu Suyong. Determination of optical constants and thicknesses of high-reflection multilayer system[J]. Journal of Applied Optics, 2011, 32(1): 128-132. (in Chinese)

[9] Wu Xianquan, Hua Wenshen, Xie Dabin, et al. Inversions of thickness and optical constants of thin film based on improved genetic algorithm[J]. Optical Instruments, 2010, 32(3): 86-90.(in Chinese)

[10] Jing Longkang, Jiang Yurong, Ni Ting. Application of adaptive simulated annealing genetic algorithm in inverse of optical constants and thickness of the thin film[J]. Optical Technique, 2012, 38(2): 218-222. (in Chinese)

李凯朋, 王多书, 李晨, 王济州, 董茂进, 张玲. 光学薄膜参数测量方法研究[J]. 红外与激光工程, 2015, 44(3): 1048. Li Kaipeng, Wang Duoshu, Li Chen, Wang Jizhou, Dong Maojin, Zhang Ling. Study on optical thin film parameters measurement method[J]. Infrared and Laser Engineering, 2015, 44(3): 1048.

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