应用光学, 2020, 41 (4): 844, 网络出版: 2020-08-20  

基于位相测量偏折术的高精度检测平面光学元件面形的方法 下载: 794次

Method of optical flat elements surface figure detection with high accuracy based on phase measurement deflectormetry
作者单位
四川大学 电子信息学院,四川 成都 610065
引用该论文

李大海, 王瑞阳, 张新伟. 基于位相测量偏折术的高精度检测平面光学元件面形的方法[J]. 应用光学, 2020, 41(4): 844.

Dahai LI, Ruiyang WANG, Xinwei ZHANG. Method of optical flat elements surface figure detection with high accuracy based on phase measurement deflectormetry[J]. Journal of Applied Optics, 2020, 41(4): 844.

参考文献

[1] KAFRI O, LIVNAT A. Reflective surface analysis using moiré deflectometry[J]. Applied Optics, 1981, 20(18): 3098-3100.

[2] RITTER R, HAHN R. Contribution to analysis of the reflection grating method[J]. Optics and Lasers in Engineering, 1983, 4(1): 13-24.

[3] PERARD D, BEYERER J. Three-dimensional measurement of specular free-form surfaces with a structured-lighting reflection technique[J]. SPIE, 1997, 3204: 74-80.

[4] TANG Yan, SU Xianyu, LIU Yuankun. 3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry[J]. Optics Express, 2008, 16(19): 15090-15096.

[5] HUANG Lei, IDIR Mourad, ZUO Chao. Review of phase measuring deflectometry[J]. Optics and Lasers in Engineering, 2018, 107: 247-257.

[6] KNAUER M C, KAMINSKI J, HAUSLER G. Phase measuring deflectometry: a new approach to measure specular free-form surfaces[J]. SPIE, 2004, 5457: 366-376.

[7] KOPYLOW T B, LI Wansong, CHRISTOPH V K. High-resolution 3D shape measurement on specular surfaces by fringe reflection[J]. SPIE, 2004, 5457: 411-422.

[8] HÄUSLER G, RICHTER C, LEITZ K H. Microdeflectometry: a novel tool to acquire three-dimensional microtopography with nanometer height resolution[J]. Optics Letters, 2008, 33(4): 396-398.

[9] FABER C, OLESCH E, KROBOT R. Deflectometry challenges interferometry: the competition gets tougher![J]. SPIE, 2012, 8493: 8493OR-1-15.

[10] OLESCH E, HÄUSLER G, WÖRNLEIN A. Deflectometric measurement of large mirrors[J]. Advanced Optical Technologies, 2014, 3(3): 335-343.

[11] SU Peng, PARKS R E, WANG Lirong. Software configurable optical test system: a computerized reverse Hartmann test[J]. Applied Optics, 2010, 49(23): 4404-4412.

[12] SU Peng, WANG Yuhao, BURGE J H. Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach[J]. Optics Express, 2012, 20(11): 12393-12406.

[13] SU Tianquan, WANG Shanshan, PARKS R E.. Measuring rough optical surfaces using scanning long-wave optical test system 1: principle and implementation[J]. Applied Optics,, 2013, 52(29): 7117-7126.

[14] RÖTTINGER C, FABER C, KURZ M, et al. Deflectometry f Ultraprecision machining measuring without rechecking[C]. GER: DGaO Proceedings, 2011.

[15] HUANG Run, SU Peng, HORNE T. Optical metrology of a large deformable aspherical mirror using software configurable optical test system[J]. Optical Engineering, 2014, 53(8): 1-8.

[16] ] ZHANG Hongwei, HAN Shujian, LIU Shugui. 3D shape reconstruction of large specular surface[J]. Applied Optics, 2012, 51(31): 7616-7625.

[17] 赵文川, ZHAO Wenchuan, ZHOU Ming, 周敏, 刘海涛, LIU Haitao. The off‐axis aspheric mirror testing based on the fringe reflection technique[J]. Opto-Electronic Engineering, 2018, 45(7): 32-39.

[18] 袁婷, YUAN Ting, ZHANG Feng, 张峰, 陶小平, TAO Xiaoping. Three-dimensional shape measuring for specular surface based on phase measuring deflectometry[J]. Acta Optica Sinica, 2016, 36(2): 101-107.

[19] ZHOU Tian, CHEN Kun, WEI Haoyun. Improved method for rapid shape recovery of large specular surfaces based on phase measuring deflectometry[J]. Applied Optics, 2016, 55(10): 2760-2770.

[20] HUANG L, CHOI H, ZHAO W C. Adaptive interferometric null testing for unknown freeform optics metrology[J]. Optics Letters, 2016, 41(23): 5539-5542.

[21] LIU Yue, HUANG Shujun, ZHANG Zonghua. Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry[J]. Scientific Reports, 2017, 7(1).

[22] NIU Zhenqi, XU Xueyang, ZHANG Xiangchao. Efficient phase retrieval of two-directional phase-shifting fringe patterns using geometric constraints of deflectometry[J]. Optics Express, 2019, 27(6): 8195-8207.

[23] ZHANG Xiangchao, XU Xueyang, NIU Zhenqi, et al. Fast deflectometric measurement of freefm surfaces f ultraprecision optical manufacturing[C]. USA: SPIE, 2019.

[24] SU P, KHREISHI M A H, SU T. Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test[J]. Optical Engineering, 2014, 53(3).

[25] ZHANG Zhengyou. A flexible new technique for camera calibration[J]. IEEE Transactions on Pattern Analysis and Machine Intelligence, 2000, 22(11): 1330-1334.

[26] E Kewei, LI Dahai, YANG Lijie. Novel method for high accuracy figure measurement of optical flat[J]. Optics and Lasers in Engineering, 2017, 88: 162-166.

[27] SOUTHWELL W H Wavefront estimation from wavefront slope measurements[J]. Journal of the Optical Society of America, 1980, 70: 998–1006.

[28] LI Mengyang, LI Dahai, JIN Chengying. Improved zonal integration method for high accurate surface reconstruction in quantitative deflectometry[J]. Applied Optics, 2007, 56(13): F144-F151.

[29] E Kewei, LI Dahai, ZHANG Chen. Four-step shear method for the absolute measurement of a flat surface based on phase measuring deflectometry[J]. Applied Optics, 2016, 55(30): 8419-8425.

[30] CHEN Pengyu, LI Dahai, WANG Qionghua. A method of sub-aperture slope stitching for testing flat element based on phase measuring deflectometry[J]. Optics and Lasers in Engineering, 2018, 110: 392-400.

[31] AFTAB M, BURGE J H, SMITH G A. Modal data processing for high resolution deflectometry[J]. International Journal of Precision Engineering and Manufacturing-Green Technology, 2019, 6(2): 255-270.

[32] WANG Ruiyang, LI Dahai, LI Lei. Surface shape measurement of transparent planar elements with phase measuring deflectometry[J]. Optical Engineering, 2018, 57(10): 104104-1-8.

[33] ZUO C, FENG S J, HUANG L. Phase shifting algorithms for fringe projection profilometry: a review[J]. Optics and Lasers in Engineering, 2018, 109: 23-59.

[34] WANG Ruiyang, LI Dahai, XU Kaiyuan. Parasitic reflection elimination using binary pattern in phase measuring deflectometry[J]. Optics Communications, 2019, 451: 67-73.

李大海, 王瑞阳, 张新伟. 基于位相测量偏折术的高精度检测平面光学元件面形的方法[J]. 应用光学, 2020, 41(4): 844. Dahai LI, Ruiyang WANG, Xinwei ZHANG. Method of optical flat elements surface figure detection with high accuracy based on phase measurement deflectormetry[J]. Journal of Applied Optics, 2020, 41(4): 844.

引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!