红外与激光工程, 2017, 46 (7): 0717003, 网络出版: 2017-09-21
基于变速扫描技术的大尺寸台阶测量
Measurement of large step structure with a speed-variable scanning technology
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雷李华, 李源, 蔡潇雨, 魏佳斯, 傅云霞, 邵力. 基于变速扫描技术的大尺寸台阶测量[J]. 红外与激光工程, 2017, 46(7): 0717003. Lei Lihua, Li Yuan, Cai Xiaoyu, Wei Jiasi, Fu Yunxia, Shao Li. Measurement of large step structure with a speed-variable scanning technology[J]. Infrared and Laser Engineering, 2017, 46(7): 0717003.
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