光子学报, 2018, 47 (4): 0423002, 网络出版: 2018-03-15   

三级台面InGaAs/InP雪崩光电二极管的低边缘电场设计

Design of Triple-mesa InGaAs/InP Avalanche Photodiode with Low Edge Electric Field
作者单位
1 天津大学 微电子学院 天津市成像与感知微电子技术重点实验室, 天津, 300072
2 中国科学院半导体研究所, 北京 100084
引用该论文

朱帅宇, 谢生, 陈宇. 三级台面InGaAs/InP雪崩光电二极管的低边缘电场设计[J]. 光子学报, 2018, 47(4): 0423002.

ZHU Shuai-yu, XIE Sheng, CHEN Yu. Design of Triple-mesa InGaAs/InP Avalanche Photodiode with Low Edge Electric Field[J]. ACTA PHOTONICA SINICA, 2018, 47(4): 0423002.

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朱帅宇, 谢生, 陈宇. 三级台面InGaAs/InP雪崩光电二极管的低边缘电场设计[J]. 光子学报, 2018, 47(4): 0423002. ZHU Shuai-yu, XIE Sheng, CHEN Yu. Design of Triple-mesa InGaAs/InP Avalanche Photodiode with Low Edge Electric Field[J]. ACTA PHOTONICA SINICA, 2018, 47(4): 0423002.

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