热处理对电子束蒸发TiO2雕塑薄膜双折射性能的影响
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肖秀娣, 董国平, 邓淞文, 邵建达, 范正修. 热处理对电子束蒸发TiO2雕塑薄膜双折射性能的影响[J]. 中国激光, 2009, 36(8): 2166. Xiao Xiudi, Dong Guoping, Deng Songwen, Shao Jianda, Fan Zhengxiu. Effects of Heat Treatment on TiO2 Sculptured Thin Films Birefringence Prepared by Electron Beam Deposition[J]. Chinese Journal of Lasers, 2009, 36(8): 2166.
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