光学学报, 2008, 28 (5): 883, 网络出版: 2008-05-20   

子孔径拼接干涉测量的精度估计方法

Approach to Accuracy Evaluation for Subaperture Stitching Interferometry
作者单位
国防科技大学机电工程与自动化学院, 湖南 长沙 410073
摘要
作为一种高精度的光学镜面测量方法,子孔径拼接干涉测量的精度指标十分重要,必须对其进行定量估计。提出将子孔径拼接干涉的结果与全口径测试结果进行对比实验,将全口径测试结果作为拼接测量结果的参考真值,讨论了拼接测量精度评价指标及其计算方法。全口径测试与子孔径拼接干涉测量的几何参量并不相同,提出将全口径测试结果与子孔径拼接结果进行最优匹配,其原理与子孔径拼接算法的原理相同。在最优匹配后计算拼接测量精度的评价指标,通过测量实验进行了验证,结果表明最优匹配后的误差指标比未经最优匹配的误差指标减小约48%,证明上述方法是一种定量估计子孔径拼接干涉测量精度的有效方法。
Abstract
As a high-precision testing method for optical surfaces, accuracy of the subaperture stitching interferometry is very important and must be evaluated quantitatively. The contrast test approach is proposed to evaluate the measurement accuracy with the full aperture test taken as a reference. Then the figures of merit as well as their computing methods are discussed. Since the geometrical parameters are different in the full aperture test and the subaperture stitching test, optimal matching is proposed between the two test results. The principle resembles that of the subaperture stitching algorithm. The figures of merit are computed following the matching process. Finally experiments are presented, and the results show the figure of merit with matching is reduced by about 48% of that without matching, which proves the validity of the approach for quantitative accuracy evaluation of subaperture stitching interferometry.
参考文献

[1] Zhi Yang, Yifang Dai, Guilin Wang. Use of wavelet in specifying optics[J]. Chin. Opt. Lett., 2007, 5(1): 44~46

[2] . J. Kim, J. C. Wyant. Subaperture test of a large flat or a fast aspheric surface[J]. J. Opt. Soc. Am., 1981, 71: 1587.

[3] J. G. Thunen, O. Y. Kwon. Full aperture testing with subaperture test optics[C]. Proc. SPIE, 1982, 351: 19~27

[4] . W. Chow, G. N. Lawrence. Method for subaperture testing interferogram reduction[J]. Opt. Lett., 1983, 8(9): 468-470.

[5] T. W. Stuhlinger. Subaperture optical testing: experimental verification[C]. Proc. SPIE, 1986, 656: 118~127

[6] M. Y. Chen, W. M. Cheng, C. W. Wang. Multi-aperture overlap-scanning technique for large-aperture test[C]. Proc. SPIE, 1991, 1553: 626~635

[7] J. Fleig, P. Dumas, P. E. Murphy et al.. An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces[C]. Proc. SPIE, 2003, 5188: 296~307

[8] . Iterative algorithm for subaperture stitching interferometry for general surfaces[J]. J. Opt. Soc. Am. A, 2005, 22(9): 1929-1936.

[9] . . Iterative algorithm for subaperture stitching test with spherical interferometers[J]. J. Opt. Soc. Am. A, 2006, 23(5): 1219-1226.

[10] Xi Hou, Fan Wu, Li Yang et al.. Stitching algorithm for annular subaperture interferometry[J]. Chin. Opt. Lett., 2006, 4(4): 211~214

[11] . Otsubo, K. Okada, J. Tsujiuchi. Measurement of large plane surface shapes by connecting small-aperture interferograms[J]. Opt. Engng., 1994, 33(2): 608-613.

[12] Zhang Rongzhu, Yang Chunlin, Shi Qikai et al.. Principle and accuracy of the stitching interferometer[J]. Acta Optica Sinica, 2003, 23(10): 1241~1244
张蓉竹,杨春林,石琦凯 等. 子孔径拼接干涉检测及其精度分析[J]. 光学学报, 2003, 23(10): 1241~1244

[13] . C. Wyant, J. Schmit. Large field of view, high spatial resolution, surface measurements[J]. Int. J. Mach. Tools Manufact., 1998, 38(5): 691-698.

[14] M. A. Schmucker, J. Schmit. Selection process for sequentially combining multiple sets of overlapping surface profile interferometric data to produce a continuous composite map[P]. US Patent, 5,991,461, 1999-10-17

[15] . . Testing of large optical surfaces with subaperture stitching[J]. Appl. Opt., 2007, 46(17): 3504-3509.

[16] Zeng Danhua, Xiao Tiqiao, Xi Zaijun et al.. Detector nonlinear error and compensation in phase-stepping interferometry[J]. Acta Optica Sinica, 2006, 26(9): 1358~1362
曾丹华,肖体乔,席再军 等. 相移干涉仪中探测器非线性误差及其补偿[J]. 光学学报, 2006, 26(9): 1358~1362

[17] Li Jun, Chen Haiqing, Ren Wenxin et al.. Improvement of the robustness of Hartmann wavefront sensor by using Zernike moment[J]. Chin. J. Lasers, 2006, 33(8): 1033~1037
李俊,陈海清,任温馨 等. Zernike矩提高哈特曼波前传感器的鲁棒性[J]. 中国激光, 2006, 33(8): 1033~1037

陈善勇, 戴一帆, 解旭辉, 丁凌艳. 子孔径拼接干涉测量的精度估计方法[J]. 光学学报, 2008, 28(5): 883. Chen Shanyong, Dai Yifan, Xie Xuhui, Ding Lingyan. Approach to Accuracy Evaluation for Subaperture Stitching Interferometry[J]. Acta Optica Sinica, 2008, 28(5): 883.

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