End-Hall与APS离子源辅助沉积制备的薄膜特性
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艾万君, 熊胜明. End-Hall与APS离子源辅助沉积制备的薄膜特性[J]. 中国激光, 2011, 38(11): 1107001. Ai Wanjun, Xiong Shengming. Properties of Thin Films Prepared with End-Hall and APS Ion Assisted Deposition[J]. Chinese Journal of Lasers, 2011, 38(11): 1107001.