飞秒激光双光子聚合方法加工图案化微透镜及其成像测试

为改善以往图案化透镜加工工艺复杂、制造技术昂贵、图案设计方面有限制等缺点, 本文将飞秒激光双光子聚合加工技术应用于图案化微透镜的快速、高精度加工。通过球面波因子的变形设计了不同图案的微透镜, 利用飞秒激光双光子聚合加工技术在光刻胶样品中加工出图案化的微透镜, 然后将光刻胶样品置于显影液中去除未聚合部分, 得到图案化微透镜, 最后对图案化微透镜进行成像测试和光强均一化分析。将 LED光源分别置于不同图案微透镜的下方, 光线透过图案化微透镜成功聚焦出光强一致的焦点图案。实验结果表明, 使用飞秒激光双光子聚合加工可以实现灵活可控的 3D图案化微透镜结构的加工, 采用加工功率为 7 mW, 曝光时间为 2 ms, 扫描 xy步距为 0. 5 μm, z步距为 0. 8~1. 5 μm, 不仅保证了微透镜结构表面光滑, 而且实现了微透镜的快速加工。该技术在加工光学超材料、光学微器件、集成光学器件等方面具有广阔的应用前景。

Abstract

Two-photon polymerization technology for use in a femtosecond laser was used in the rapid and high-precision processing of a patterned microlens to improve the previous shortcomings, including a complex processing technology, expensive manufacturing technology, and limited pattern design. First, three-dimensional software was used to design the microlens pattern through the deformation of the spherical wave factor, and the two-photon polymerization processing technology for a femtosecond laser was used to process the patterned microlens in the photoresist sample. The sample was then placed in a developer to re. move the unprocessed area and obtain the corresponding patterned microlens. Finally, an imaging test and a light intensity homogenization analysis of the patterned microlens were carried out. An LED light source was placed below the patterned microlens, and the light was successfully focused through the patterned mi. crolens to obtain the corresponding patterns with the same light intensity. The experiment shows that the two-photon polymerization of a femtosecond laser can realize the flexible and controllable processing of a 3D microlens structure, a processing power of 7 mW, an exposure time of 2 ms, a scanning xy-step of 0. 5 μm, and a z-step of0. 8-1. 5 μm, ensuring the smooth surface of the microlens structure and realizing a rap. id microlens processing. The two-photon polymerization technology for a femtosecond laser will play an important role in the processing field such as optical metamaterials, optical microdevices, and integrated optical devices.

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苏亚辉, 秦天天, 许兵, 吴东. 飞秒激光双光子聚合方法加工图案化微透镜及其成像测试[J]. 光学精密工程, 2020, 28(12): 2629. SU Ya-hui, QIN Tian-tian, XU Bing, WU Dong. P attern ed m icrolen s p rocessed u sing tw o -photon polym erization of fem tosecond laser and its im agin g test[J]. Optics and Precision Engineering, 2020, 28(12): 2629.

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