光学学报, 1990, 10 (8): 706, 网络出版: 2007-11-12
软X射线(60～900eV)超薄膜的光学常数
Optical constants of superthin films in the soft X-ray region (60-900eV)
摘要
用反射率方法测定了软X射线波段(60～900eV)超薄膜的光学常数.反射率测量在同步辐射光束线上完成.对测量数据做非线性最小二乘曲线拟合得出光学常数,同时还精密确定了超薄膜的膜厚与薄膜与基板表面粗度的均方根值.文中介绍了样品制备、反射率测量、数据解析及误差分析的方法,并给出了C、Au、Pt超薄膜的相应结果.
Abstract
The optical constants of superthin films have been obtained from the reflectance vs. angle of incidence measurements using synchrotron radiation in the 60-900eV soft X-ray region. Nonlinear least square curve fitting method is used for analyzing the measured data. Eesults are given for Samples of C, Au, and Pt prepared by ion-beam sputtering (IBS), and the film thickness, the rms roughness of both films and substrates are also determined.
参考文献
曹健林, 陈星旦, 柳原美广, 山本正树, 波冈武. 软X射线(60～900eV)超薄膜的光学常数[J]. 光学学报, 1990, 10(8): 706. 曹健林, 陈星旦, 柳原美广, 山本正树, 波冈武. Optical constants of superthin films in the soft X-ray region (60-900eV)[J]. Acta Optica Sinica, 1990, 10(8): 706.
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