红外与激光工程, 2005, 34 (1): 110, 网络出版: 2006-05-25
MOEMS光学系统的发展与应用
Development and application of MOEMS optical system
摘要
概述了MOEMS光学系统的种类和特点,介绍了几种主要的MOEMS光学产品、机理和应用方向,阐明了其作为光电技术的前沿所具有的重要作用和广阔前景,提出了相关的研究建议.
Abstract
The sorts and characteristics of the Micro-Opto-Electro-Mechanical System (MOEMS) are presented, and several kinds of important MOEMS′ products are described.Within the discussion it refered the working mechanism,the applications in optoelectric field and its development outlook. Some advice for MOEMS research are presented.
耿凡. MOEMS光学系统的发展与应用[J]. 红外与激光工程, 2005, 34(1): 110. 耿凡. Development and application of MOEMS optical system[J]. Infrared and Laser Engineering, 2005, 34(1): 110.
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