[1] 潘宁, Pan Ning, 梁勖, Liang Xu, Lin Ying, 林颖. Transmission method of analog signal in excimer laser system[J]. Infrared and Laser Engineering, 2019, 48(9): 0905003.

[2] 朱峰, Zhu Feng, Yu Li, 于力, 易爱平, Yi Aiping. Spectral compression of XeF(C-A) excimer laser using grating resonator with an intra-acvity etalon[J]. Optics and Precision Engineering, 2018, 26(12): 2888-2893.

[3] 周传清, Zhou Chuanqing, Yu Lei, 余雷, 陆培华, Lu Peihua. Effect of asphericity parameter on Seidal aberration and ablation depth in laser refractive surgery[J]. Optics and Precision Engineering, 2007, 15(2): 167-172.

[4] 毕丹丹, Bi Dandan, 张立超, Zhang Lichao, 时光, Shi Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Journal of Optics, 2018, 11(5): 745-764.

[5] Petrova T B, Petrov G M, Wolfd M F, et al. Modeling of an electronbeam pumped arf excimer laser[C]2017 IEEE International Conference on Plasma Science (ICOPS), 2017: 11.

[6] Tsushima H, Fujimaki Y, Kiyota Y, et al. Extremely long life excimer laser chamber technology f multipatterning lithography[C]SPIE, 2019, 10961: 109610X.

[7] Losev V F, Losev V F, Panchenko Y N, Panchenko Y N, Dudarev V V, Dudarev V V. Development of discharge pulse repetition rate excimer lasers for different applications[J]. Chinese Journal of Optics, 2011, 4(1): 1-8.

[8] 袁靖超, Yuan Jingchao, Zhao Jiangshan, 赵江山, 李慧, Li Hui. Research of peak-detection algorithm based on absolute wavelength calibration of excimer laser[J]. Chinese Journal of Lasers, 2018, 45(7): 19-25.

[9] 刘斌, Liu Bin, 丁金滨, Ding Jinbin, 王魁波, Wang Kuibo. Experimental study of characteristics of discharge shock waves in high-repetition-rate excimer lasers[J]. Chinese Journal of Lasers, 2019, 46(12): 1201001.

[10] 梁勖, Liang Xu, 赵读亮, Zhao Duliang, 林颖, Lin Ying. High repetition rate and high accuracy capacitor charging pulse power supply based on controllable LC series resonance[J]. High Voltage Engineering, 2018, 44(9): 3022-3027.

[11] 周松青, Zhou Songqing, 黄珂, Huang Ke, Shen Yanlong, 沈炎龙. Design and experimental investigation of unstable resonator for discharge initiated repetitive-pulsed HF laser[J]. Infrared and Laser Engineering, 2019, 48(10): 1005002.

[12] 来五星, Lai W X, Shi T L, 史铁林, 杨叔子, Yang S Z. Development of embedded laser energy real-time control system[J]. Semiconductor Optoelectronics, 2006, 27(3): 328-330.

[13] 梁勖, Liang Xu, 游利兵, You Libing, 王涛, Wang Tao. Excimer pulse energy stabilization realized by charging voltage realtime adjusting[J]. Chinese Journal of Lasers, 2010, 37(2): 374-378.

[14] Ishida K, Ohta T, Miyamoto H, et al. The ArF laser f the nextgeneration multiplepatterning immersion lithography suppting green operations[C]SPIE 2016, 9780: 978010.

[15] 王效顺, Wang Xiaoshun, 梁勖, Liang Xu, 游利兵, You Libing. Study on energy control algorithm for high-repetition-rate ArF excimer lasers[J]. Laser Technology, 2012, 36(6): 763-766.