利用光学多通道分析仪(OMA Ⅲ)分析了脉冲激光沉积BaTiO3薄膜过程中激光诱导等离子体束的飞行时间谱。根据不同实验参数与条件下等离子体束的飞行时间谱的特征,讨论了条件对等离子体喷射速度的影响。结果表明,在脉冲激光沉积薄膜的情况下,喷射等离子体的飞行速度主要依赖于作用于靶面的激光能量密度。

The time-of-flight spectra of laser induced plasma from BaTiO3 during polsed laser deposition were studied with an optical multichannel analyzer (OMA Ⅲ). The influence of the experimental conditions on the flight velocity of the ejected plasma was discussed based on the feature of their time-of-flight spectra. And it is concluded that the flight speed of the plasma depends mainly on the laser fluence incident upon the ablation target surface in the pulsed laser deposition process.