多层GaN外延片表面热应力分布及影响因素
陈靖, 程宏昌, 吴玲玲, 冯刘, 苗壮. 多层GaN外延片表面热应力分布及影响因素[J]. 红外与激光工程, 2016, 45(10): 1021001.
Chen Jing, Cheng Hongchang, Wu Lingling, Feng Liu, Miao Zhuang. Surface thermal stress distribution and the influence factors of Sapphire/AlN/GaN epilayers[J]. Infrared and Laser Engineering, 2016, 45(10): 1021001.
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陈靖, 程宏昌, 吴玲玲, 冯刘, 苗壮. 多层GaN外延片表面热应力分布及影响因素[J]. 红外与激光工程, 2016, 45(10): 1021001. Chen Jing, Cheng Hongchang, Wu Lingling, Feng Liu, Miao Zhuang. Surface thermal stress distribution and the influence factors of Sapphire/AlN/GaN epilayers[J]. Infrared and Laser Engineering, 2016, 45(10): 1021001.
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