强激光与粒子束, 2012, 24 (5): 1098, 网络出版: 2012-05-22   

软X射线KBA显微镜分辨力及其影响因素

Soft X-ray KBA microscope resolution and its influencing factors
作者单位
中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900
摘要
为了对KBA显微镜的分辨能力进行准确计算,对KBA显微镜的分辨力和影响因素进行了研究,分析了衍射效应、几何像差、面形误差和粗糙度等因素对分辨力的影响,以此为基础建立了KBA显微镜的分辨力计算模型,并模拟了KBA显微镜的分辨力与视场的关系。用KBA显微镜获得了2.5 keV能量的X射线成像结果,中心视场范围的分辨力约为6 μm。通过实验结果与模型模拟的对比,可得建立的模型对KBA显微镜分辨力与视场尺寸的关系的描述与实际测试的结果基本符合,并对不完善之处进行了分析。
Abstract
The paper investigates the resolution of soft X-ray KBA microscope and analyzes its influencing factors, including diffractive effect, geometrical aberration, slope error and surface roughness of specula. A calculation model of the KBA microscope is obtained according to these analyses. A 2.5 keV X-ray imaging experiment is performed and the resolution agrees with the simulated data of the model in large visual field. The incompleteness of this model is also analyzed.
参考文献

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黎宇坤, 董建军, 曹柱荣. 软X射线KBA显微镜分辨力及其影响因素[J]. 强激光与粒子束, 2012, 24(5): 1098. Li Yukun, Dong Jianjun, Cao Zhurong. Soft X-ray KBA microscope resolution and its influencing factors[J]. High Power Laser and Particle Beams, 2012, 24(5): 1098.

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