移相干涉仪的抗振技术研究进展
何祖斌, 许乔, 柴立群, 邓燕. 移相干涉仪的抗振技术研究进展[J]. 光学技术, 2007, 33(3): 0416.
HE Zu-bin, XU Qiao, CHAI Li-qun, DENG Yan. Advances in vibration cancellation phase-shifting interferometer[J]. Optical Technique, 2007, 33(3): 0416.
[1] 吴新民.光干涉测试中的抗振技术研究[D].南京:南京理工大学,2002.
[2] 吴栋,陈磊,陈进榜,等.干涉仪自适应抗振的空间移相术[J].光子学报,2003,32(8) :969-972.
[3] Zhao C Y,Burge J H. Vibration-compensated interferometer for surface metrology [J]. Appl. Opt,2001,40 (34) :6215-6222.
[4] Koliopoulos C L. Simultaneous phase-shift interferometer [J].SPIE,1991(1531):119-127.
[5] Millerd J E. Methed and apparatus for splitting,imaging,and measuring wavefronts in interferometry[P]. U.S: 6304330B1,2001.
[6] Hayes J. Dynamic interferometry handles vibration[J]. Laser Focus World. March,2002:1-6.
[7] Matt Novak,JamesMillerd,Neal Brock,Michael,et al. Analysis of a micropolarizer array based simultaneous phase-shifting interferometer[J]. Appl. Opt,2005,44(32):6861-6868.
[8] Millerd J. Pixelated phase-mask dynamic interferometer[J]. SPIE,2004(5531):304-314.
[9] Saif B N,Millerd J. Instantaneous phase-shifted speckle interferometer for measurement of large optical structures[J]. SPIE,2004(5494):152-162.
[10] Wyant J C. Advances in Interferometric Metrology[J].SPIE,2002(4927) :154-162.
[11] Millerd J E. Instantaneous phase-shift,point-diffraction interferometer[J]. SPIE. 2004(5531):264-272.
[12] 何勇,姬会东,徐永祥,等.基于单管法探测相位的自适应抗振技术[J].红外与激光工程,2004,33(4) :409-413.
[13] Charles G,James C,et al. Vibration stabilization of a phase shifting interferometer for large optics[J]. SPIE,1997(3134): 438-446.
[14] Zhao C,Burge J H. Vibration-compensated interferometer for surface metrology[J]. Appl. Opt,2001,40 (34) :6215-6222.
[15] 赵伟瑞,曹根瑞.斩波式自适应移相干涉技术[J].光学学报,2002,22(7) :858-862.
[16] 艾勇.强抗干扰型正弦调制式半导体激光有源干涉仪[J].中国激光,1994,21(6) :463-468.
[17] 候立周,强锡富,孙晓明.几种任意步距步进算法的误差分析与对比[J].光学技术,1999(5) :7-10.
何祖斌, 许乔, 柴立群, 邓燕. 移相干涉仪的抗振技术研究进展[J]. 光学技术, 2007, 33(3): 0416. HE Zu-bin, XU Qiao, CHAI Li-qun, DENG Yan. Advances in vibration cancellation phase-shifting interferometer[J]. Optical Technique, 2007, 33(3): 0416.