光学技术, 2007, 33 (3): 0416, 网络出版: 2010-06-03  

移相干涉仪的抗振技术研究进展

Advances in vibration cancellation phase-shifting interferometer
作者单位
成都精密光学工程研究中心,成都 610041
摘要
在对光学元件面形进行检测和光学系统成像质量的评价中,移相干涉测量技术有着广泛地应用。但是,光学干涉仪的测量精度对环境的要求非常苛刻,环境的振动和空气的扰动会对测量结果产生很大影响。提高移相干涉仪的抗振性很有必要,受到广泛重视。国际上移相干涉仪的抗振技术主要包括主动抗振和被动抗振两方面,两种技术具有各自特点。
Abstract
Phase-shifting interferometer has wide applications in many fields including the testing of optical components and optical systems. But the measurement accuracy of phase-shifting interferometry is generally limited by the environment vibration and air turbulence. It's necessary to improve the ability of vibration-insensitive for interferometric testing. The development of two methods for reducing the sensitivity of an optical testing to vibration was discussed: the active.vibration-insensitive phaseshifting technology and the passive vibration-insensitive phase-shifting technology.
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何祖斌, 许乔, 柴立群, 邓燕. 移相干涉仪的抗振技术研究进展[J]. 光学技术, 2007, 33(3): 0416. HE Zu-bin, XU Qiao, CHAI Li-qun, DENG Yan. Advances in vibration cancellation phase-shifting interferometer[J]. Optical Technique, 2007, 33(3): 0416.

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