斯托克斯椭偏仪仪器矩阵在位定标方法

斯托克斯椭偏仪可以快速测量薄膜材料的光学参数，其仪器矩阵的精确度直接影响系统对薄膜反射光线斯托克斯参量的测量，间接限制了薄膜参数的测量精度。对线偏振光与标准薄膜片产生不同偏振态的机制进行理论推导，并根据四点定标法原理，利用线偏振光与标准薄膜片组合的在位定标方法实现对斯托克斯椭偏仪仪器矩阵的精确测量，有效避免了传统定标方法中光学元件方位角及其不完美产生的误差，进而提高了薄膜光学参数的测量精度。实验表明，采用在位定标方法，薄膜反射光线的斯托克斯参量的测量精度达0.6%，薄膜厚度及折射率的测量偏差分别小于0.2 nm及0.003。

Abstract

Stokes ellipsometer can measure the optical parameters of thin films rapidly. The precision of the instrument matrix of Stokes ellipsometer directly affects the measurement of the Stokes parameters of the light reflected by films and indirectly limits the measurement accuracy of the optical parameters of films. It is studied that how to generate elliptically polarized light with a combination of linearly polarized light and standard films theoretically. According to the four-point calibration method, the instrument matrix with combination of linearly polarized light and standard films in place are calculated, and the errors caused by the azimuth of optical components and its defects in traditional calibration methods are avoided effectively, thereby improving measurement accuracy of the optical parameters of thin films. The experimental results show that, in the method, the deviation of the measurement of Stokes parameters of light reflected by the film is less than 0.6% and the measurement deviations of thickness and refractive index are less than 0.2 nm, 0.003 repectively.

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张勇, 黄佐华, 赵振堂, 曾宪佑, 周进朝. 斯托克斯椭偏仪仪器矩阵在位定标方法[J]. 光学学报, 2013, 33(2): 0212002. Zhang Yong, Huang Zuohua, Zhao Zhentang, Zeng Xianyou, Zhou Jinzhao. In-Place Calibration of Stokes Ellipsometer′s Instrument Matrix[J]. Acta Optica Sinica, 2013, 33(2): 0212002.

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