微波等离子体化学气相沉积设备微波系统的仿真优化与验证
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王心洋, 曹光宇, 黄翀. 微波等离子体化学气相沉积设备微波系统的仿真优化与验证[J]. 人工晶体学报, 2020, 49(10): 1896. WANG Xinyang, CAO Guangyu, HUANG Chong. Simulation Optimization and Verification of a Microwave System for Microwave Plasma Chemical Vapor Deposition Device[J]. Journal of Synthetic Crystals, 2020, 49(10): 1896.