基于传输反射法的等离子体相对复介电系数测量

为解决微波激发等离子体参数诊断存在的困难问题，提出利用二端口传输反射法测量微波激励产生的低温等离子体的等效相对复介电系数。使用有限元方法设计了基于BJ22标准波导的样品测试结构，该结构能在较大的介电系数范围内，保证介电系数和端口的|S11|,φS11和|S21|参数保持较好的单调性，避免产生多值问题；通过人工神经网络对计算获得的各介电系数对应的S参数进行训练，达到足够的精确度；最后通过实验，将测量获得的S参数利用神经网络反演获得待测物质的相对复介电系数。该方法对今后测量类似等离子体、复介电系数实部为负的特殊材料的介电常数具有一定的指导意义。

Abstract

To solve the problem of parameter diagnosis of microwave excited plasma, the equivalent relative complex permittivity of low-temperature plasma excited by microwave is measured by the two-port transmission reflection method. Firstly, the sample-test structure is designed based on the standard BJ22 waveguide structure with the finite element method. The structure can ensure that the permittivity and port parameters of |S11|,φS11,|S21| keep good monotonicity in a large range of permittivity, avoiding multi-value problems. Then, artificial neural network is utilized to train the S parameters which are corresponding to each permittivity obtained by simulation, and the training results achieve sufficient accuracy. Finally, through experiments, the measured S parameters are inverted by neural network to obtain the relative complex permittivity of the substance to be measured. This method can be applied to measure the permittivity of materials like plasma which has negative real part of complex permittivity.

参考文献

[1] 李恩. 透波材料介电性能高温宽频测试技术研究[D]. 成都:电子科技大学, 2009. (LI En. Research on high temperature and wide frequency testing technology of dielectric properties of transparent materials[D]. Chengdu,China: University of Electronic Science and Technology of China, 2009.)

李恩. 透波材料介电性能高温宽频测试技术研究[D]. 成都:电子科技大学, 2009. (LI En. Research on high temperature and wide frequency testing technology of dielectric properties of transparent materials[D]. Chengdu,China: University of Electronic Science and Technology of China, 2009.)

李恩. 透波材料介电性能高温宽频测试技术研究[D]. 成都:电子科技大学, 2009. (LI En. Research on high temperature and wide frequency testing technology of dielectric properties of

transparent materials[D]. Chengdu,China: University of Electronic Science and Technology of China, 2009.)

[2] 王益,张翠翠,王建忠,等. 非磁性材料介电常数测量传输反射法改进研究[J]. 宇航计测技术, 2015,35(1):5-9. (WANG Yi,ZHANG Cuicui,WANG Jianzhong,et al. Improvement of transmission reflection

王益,张翠翠,王建忠,等. 非磁性材料介电常数测量传输反射法改进研究[J]. 宇航计测技术, 2015,35(1):5-9. (WANG Yi,ZHANG Cuicui,WANG Jianzhong,et al. Improvement of transmission reflection method for measuring dielectric constant of nonmagnetic materials[J]. Astrometric Technology, 2015,35(1):5-9.)

method for measuring dielectric constant of nonmagnetic materials[J]. Astrometric Technology, 2015,35(1):5-9.)

[3] 赵才军,蒋全兴,景莘慧. 改进的同轴传输/反射法测量复介电常数[J]. 仪器仪表学报, 2011,32(3):695-700. (ZHAO Caijun,JIANG Quanxing,JING Xinhui. Measurement of complex permittivity by

赵才军,蒋全兴,景莘慧. 改进的同轴传输/反射法测量复介电常数[J]. 仪器仪表学报, 2011,32(3):695-700. (ZHAO Caijun,JIANG Quanxing,JING Xinhui. Measurement of complex permittivity by improved coaxial transmission/reflection method[J]. Journal of Instrumentation, 2011,32(3):695-700.)

improved coaxial transmission/reflection method[J]. Journal of Instrumentation, 2011,32(3):695-700.)

[4] 张磊,韦高,毛得明. 基于VC++的介质复介电常数变温测量系统软件设计[J]. 电子测量技术, 2007,30(5):47-49. (ZHANG Lei,WEI Gao,MAO Deming. The software design of the variable temperature

张磊,韦高,毛得明. 基于VC++的介质复介电常数变温测量系统软件设计[J]. 电子测量技术, 2007,30(5):47-49. (ZHANG Lei,WEI Gao,MAO Deming. The software design of the variable temperature measurement system of dielectric complex permittivity based on VC++[J]. Electronic Measurement Technology, 2007,30(5):47-49.)

measurement system of dielectric complex permittivity based on VC++[J]. Electronic Measurement Technology, 2007,30(5):47-49.)

[5] 徐江峰,陈秋灵,倪尔瑚,等. 截止波导介质腔介电常数测量理论与方法研究[J]. 仪器仪表学报, 2006,27(10): 1322-1325. (XU Jiangfeng,CHEN Qiuling,NI Erhu,et al. Study on the theory and method of dielectric constant measurement of cut-off waveguide dielectric cavity[J]. Journal of Instrumentation, 2006,27(10):1322-1325.)

徐江峰,陈秋灵,倪尔瑚,等. 截止波导介质腔介电常数测量理论与方法研究[J]. 仪器仪表学报, 2006,27(10): 1322-1325. (XU Jiangfeng,CHEN Qiuling,NI Erhu,et al. Study on the theory and method

徐江峰,陈秋灵,倪尔瑚,等. 截止波导介质腔介电常数测量理论与方法研究[J]. 仪器仪表学报, 2006,27(10): 1322-1325. (XU Jiangfeng,CHEN Qiuling,NI Erhu,et al. Study on the theory and method of dielectric constant measurement of cut-off waveguide dielectric cavity[J]. Journal of Instrumentation, 2006,27(10):1322-1325.)

of dielectric constant measurement of cut-off waveguide dielectric cavity[J]. Journal of Instrumentation, 2006,27(10):1322-1325.)

[6] SANTRA M,LIMAYE K U. Estimation of complex permittivity of arbitrary shape and size dielectric samples using cavity measurement technique at microwave frequencies[J]. IEEE Transactions on Microwave Theory and Techniques, 2005, 53(2):718-722.

SANTRA M,LIMAYE K U. Estimation of complex permittivity of arbitrary shape and size dielectric samples using cavity measurement technique at microwave frequencies[J]. IEEE Transactions on Microwave Theory and Techniques, 2005, 53(2):718-722.

Transactions on Microwave Theory and Techniques, 2005, 53(2):718-722.

SANTRA M,LIMAYE K U. Estimation of complex permittivity of arbitrary shape and size dielectric samples using cavity measurement technique at microwave frequencies[J]. IEEE

[7] 张伟,苏东林. 自由空间法测量复合材料复电磁参数[J]. 复合材料学报, 2007,24(1):145-149. (ZHANG Wei,SU Donglin. Measurement of complex electromagnetic parameters of composite materials by free space method[J]. Journal of Composite Materials, 2007,24(1):145-149.)

张伟,苏东林. 自由空间法测量复合材料复电磁参数[J]. 复合材料学报, 2007,24(1):145-149. (ZHANG Wei,SU Donglin. Measurement of complex electromagnetic parameters of composite materials by free space method[J]. Journal of Composite Materials, 2007,24(1):145-149.)

张伟,苏东林. 自由空间法测量复合材料复电磁参数[J]. 复合材料学报, 2007,24(1):145-149. (ZHANG Wei,SU Donglin. Measurement of complex electromagnetic parameters of composite materials

by free space method[J]. Journal of Composite Materials, 2007,24(1):145-149.)

[8] GHODGAONKAR D K,VARADAN V V,VARADAN V K. Free-space measurement of complex permittivity and complex permeability of magnetic materials at microwave frequencies[J]. IEEE Transactions

1990,39(2):387-394.

on Instrumentation and Measurement,

GHODGAONKAR D K,VARADAN V V,VARADAN V K. Free-space measurement of complex permittivity and complex permeability of magnetic materials at microwave frequencies[J]. IEEE Transactions on Instrumentation and Measurement, 1990,39(2):387-394.

[9] GERSHON D L,CALAME J P,CARMEL Y,et al. Open-ended coaxial probe for high-temperature and broad-band dielectric measurements[J]. IEEE Transactions on Microwave Theory and Techniques, 1999,47(9):1640-1648.

GERSHON D L,CALAME J P,CARMEL Y,et al. Open-ended coaxial probe for high-temperature and broad-band dielectric measurements[J]. IEEE Transactions on Microwave Theory and Techniques, 1999,47(9):1640-1648.

1999,47(9):1640-1648.

GERSHON D L,CALAME J P,CARMEL Y,et al. Open-ended coaxial probe for high-temperature and broad-band dielectric measurements[J]. IEEE Transactions on Microwave Theory and Techniques,

[10] 开金星. 基于矩形波导传输/反射法测量K和Ka波段微波材料电磁参数的研究[D]. 南京:南京邮电大学, 2013. (KAI Jinxing. Measurement of electromagnetic parameters of microwave materials in K

开金星. 基于矩形波导传输/反射法测量K和Ka波段微波材料电磁参数的研究[D]. 南京:南京邮电大学, 2013. (KAI Jinxing. Measurement of electromagnetic parameters of microwave materials in K and Ka band based on transmission/reflection method of rectangular waveguide[D]. Nanjing,China:Nanjing University of Posts and Telecommunications, 2013.)

and Ka band based on transmission/reflection method of rectangular waveguide[D]. Nanjing,China:Nanjing University of Posts and Telecommunications, 2013.)

[11] 田步宁,杨德顺,唐家明,等. 传输/反射法测量材料电磁参数的研究[J]. 电波科学学报, 2001,16(1):57-60. (TIAN Buning,YANG Deshun,TANG Jiaming,et al. Study on the measurement of electromagnetic parameters of materials by transmission/reflection method[J]. Journal of Radio Wave Science, 2001,16(1):57-60.)

田步宁,杨德顺,唐家明,等. 传输/反射法测量材料电磁参数的研究[J]. 电波科学学报, 2001,16(1):57-60. (TIAN Buning,YANG Deshun,TANG Jiaming,et al. Study on the measurement of

田步宁,杨德顺,唐家明,等. 传输/反射法测量材料电磁参数的研究[J]. 电波科学学报, 2001,16(1):57-60. (TIAN Buning,YANG Deshun,TANG Jiaming,et al. Study on the measurement of electromagnetic parameters of materials by transmission/reflection method[J]. Journal of Radio Wave Science, 2001,16(1):57-60.)

electromagnetic parameters of materials by transmission/reflection method[J]. Journal of Radio Wave Science, 2001,16(1):57-60.)

[12] 冯永宝,丘泰. 传输/反射法测量微波吸收材料电磁参数的研究[J]. 电波科学学报, 2006,21(2):293-297. (FENG Yongbao,QIU Tai. Measurement of electromagnetic parameters of microwave absorbing

冯永宝,丘泰. 传输/反射法测量微波吸收材料电磁参数的研究[J]. 电波科学学报, 2006,21(2):293-297. (FENG Yongbao,QIU Tai. Measurement of electromagnetic parameters of microwave absorbing materials by transmission/ reflection method[J]. Journal of Radio Wave Science, 2006,21(2):293-297.)

materials by transmission/ reflection method[J]. Journal of Radio Wave Science, 2006,21(2):293-297.)

吴晓明, 杨帆, 解田, 吴丽, 朱铧丞, 杨阳, 黄卡玛. 基于传输反射法的等离子体相对复介电系数测量[J]. 太赫兹科学与电子信息学报, 2020, 18(2): 273. WU Xiaoming, YANG Fan, XIE Tian, WU Li, ZHU Huacheng, YANG Yang, HUANG Kama. Measurement of relative complex permittivity of plasmas based on transport reflection method[J]. Journal of terahertz science and electronic information technology, 2020, 18(2): 273.

基于传输反射法的等离子体相对复介电系数测量

关于本站 Cookie 的使用提示

全站搜索

基于传输反射法的等离子体相对复介电系数测量

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索