基于光闸叠栅条纹的纳米检焦方法
严伟, 李艳丽, 陈铭勇, 王建. 基于光闸叠栅条纹的纳米检焦方法[J]. 光学学报, 2011, 31(8): 0805001.
Yan Wei, Li Yanli, Chen Mingyong, Wang Jian. Moiré Fringe-Based Focusing-Test Scheme for Optical Projection Lithography[J]. Acta Optica Sinica, 2011, 31(8): 0805001.
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严伟, 李艳丽, 陈铭勇, 王建. 基于光闸叠栅条纹的纳米检焦方法[J]. 光学学报, 2011, 31(8): 0805001. Yan Wei, Li Yanli, Chen Mingyong, Wang Jian. Moiré Fringe-Based Focusing-Test Scheme for Optical Projection Lithography[J]. Acta Optica Sinica, 2011, 31(8): 0805001.