Photonics Research, 2020, 8 (12): 12001827, Published Online: Nov. 13, 2020
Emerging micro-additive manufacturing technologies enabled by novel optical methods 
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Fig. 1. Microproducts fabricated via micro-3D printing technology: (a) 3D gate pressure-actuated multi-flow controller (reprinted by permission from RSC: Lab on a Chip [21], copyright 2015); (b) photonic crystal (reprinted by permission from Wiley-VCH: Advanced Materials [22], copyright 2006); (c) cell holder (reprinted by permission from Wiley-VCH: Advanced Materials [23], copyright 2011); (d) 3D electrically small antennas (reprinted by permission from Wiley-VCH: Advanced Materials [24], copyright 2011); (e) mechanical metamaterials (reprinted by permission from AAAS: Science [25], copyright 2014); and (f) wireless transmitter clocked by an oscillator (reprinted by permission from Wiley-VCH: Advanced Materials [26], copyright 2017).
Fig. 2. (a) Energy-level diagram for photoinitiator molecules for one-photon and two-photon excitation. h ν S 0 S 1 T 1
Fig. 3. Main scanning methods for point-scanning 3D printing based on (a) X Y Z
Fig. 4. Rapid multi-focus two-photon printing technique: (a) schematic for the 3D printing system and (b)–(d) scanning electron micrographs of the 3D printed mechanical metamaterial (reprinted from Wiley-VCH: Advanced Functional Materials [90], copyright 2020).
Fig. 5. Holographic multi-focus 3D printing technique: (a) system schematic; (b) serial hologram in the printing process; (c) 4 − f
Fig. 6. DMD-based multi-focus 3D printing technique: (a) schematic for DMD 3D printing system; (b) model and SEM images of printed results of octet truss realized by single-focus two-photon polymerization; and (c) comparison of fabrication results of woodpile structures with single focus, two foci, and three foci (reprinted from Springer Nature: Nature Communications [104], copyright 2019).
Fig. 7. (a) Schematics of the multi-material projection micro-stereolithography system and its overall process; (b) Taiji symbol patterned cylinder made of two different materials; (c) multi-material bilayer micro-capillary structure with fluorescent substances; and (d) 3D helix composed of three different parts: particle-free center pillar, two helix arms loaded with copper, and alumina nano-particles (reprinted by permission from Elsevier B.V.: Additive Manufacturing [115], copyright 2019).
Fig. 8. (a) Schematic for the high-area rapid printing based on mobile–liquid interface; (b) velocity profiles under the printed part at different flow speeds; (c) inset of the slip boundary flow profile under the part; and (d) a ∼ 1.2 - m
Fig. 9. (a) 3D printing using a layer-by-layer projection of digital masks; (b) optical configuration of the FP-TPL system; (c) zoomed-in schematic of temporal focusing in the focal volume of the objective lens; and (d) structures printed by the FP-TPL system (reprinted by permission from AAAS: Science [123], copyright 2019).
Fig. 10. (a) Optical configuration of the holographic volumetric 3D fabrication system; (b)–(g) structures fabricated with a single exposure (reprinted from AAAS: Science Advances [125], copyright 2017).
Fig. 11. (a) Printing mechanism of the computed axial lithography; (b) configuration of the computed axial lithography; and (c) various 3D structures printed with different materials (reprinted by permission from AAAS: Science [126], copyright 2019).
Fig. 12. (a) Configuration of tomographic 3D fabrication system with feedback; (b) étendue-limited optical resolution; and (c) comparison between the tomographic 3D printed artery with and without feedback (reprinted from Springer Nature: Nature Communications [128], copyright 2020).
Fig. 13. Summary of different 3D printing techniques plotted versus the resolution (lower logarithmic horizontal scale) and throughput, evaluated with volumetric processing rate (left logarithmic vertical scale): volumetric fabrication (black squares); layer-scanning-based manufacturing (red spheres); single-focus point-scanning fabrication (blue hexagons); multi-focus point-scanning fabrication (green stars); and multi-focus random-access fabrication (enlarged green stars). The labels of the data point refer to the serial numbers of corresponding references. For multi-focus fabrication, the number of foci used is reported next to the reference number after the hyphen.
Fig. 14. Illustration of different methods for printing objects with super-resolution feature sizes: (a) precise power control; (b) two-photon polymerization; and (c) STED-lithography: intensity profiles of the polymerization light (black) and depletion light (blue), and exposure-dose profile (red). Definition of resolution by (d) Sparrow limit and (e) Rayleigh limit.
Fig. 15. Mesoscale sub-micrometer 3D printing: (a) mesoscale structures printed via different scanning methods and (b) structures printed by the synchronization of the galvo-scanner and linear stage (reprinted by permission from OSA: Optics Express [145], copyright 2019). (c) Optimized printing strategy against the shrinkage and proximity effect and (d) printed structures after optimization (reprinted from Springer Nature: Scientific Reports [146], copyright 2019).
Table1. Summary of Micro-3D Printing Methods in Terms of Material, Process, Fabrication Rate, and Resolution
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Wei Lin, Dihan Chen, Shih-Chi Chen. Emerging micro-additive manufacturing technologies enabled by novel optical methods[J]. Photonics Research, 2020, 8(12): 12001827.
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