Thermal process of silica glass microchannels fabricated by femtosecond laser ablation

Xiaoyan Sun; Dongmei Cui; Youwang Hu; Dongkai Chu; Guowei Chen; Jinlong Yu; Jianhang Zhou; Ji’an Duan

doi:doi:10.3788/COL201816.101402

Chinese Optics Letters, 2018, 16 (10): 101402, Published Online: Oct. 12, 2018

Thermal process of silica glass microchannels fabricated by femtosecond laser ablation Download： 908次

Xiaoyan Sun Dongmei Cui Youwang Hu ^*Dongkai Chu Guowei Chen Jinlong Yu Jianhang Zhou Ji’an Duan

Author Affiliations

State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China

Figures & Tables

Fig. 1. Schematic diagram of the experimental setup. M, mirror; ND, neutral density attenuator.

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Fig. 2. (a) Morphology of the microchannel measured by the LCM; (b) cross-section profile.

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Fig. 3. Relationship between the morphology and the laser power.

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Fig. 4. Trend of width, depth, and roughness of microchannels varies with the temperature.

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Fig. 5. SEM images of 15 mW heating at different temperatures and at an incubation time for 1 h. (a) Room temperature; (b) 400°C; (c) 800°C; the upper right corner is the selected area, and the lower right corner is the counting result.

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Fig. 6. Relationship between the change rate of the morphology and the incubation time when the work piece is heated to 800°C.

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Xiaoyan Sun, Dongmei Cui, Youwang Hu, Dongkai Chu, Guowei Chen, Jinlong Yu, Jianhang Zhou, Ji’an Duan. Thermal process of silica glass microchannels fabricated by femtosecond laser ablation[J]. Chinese Optics Letters, 2018, 16(10): 101402.

Thermal process of silica glass microchannels fabricated by femtosecond laser ablation Download： 908次

Fig. 1. Schematic diagram of the experimental setup. M, mirror; ND, neutral density attenuator.

Fig. 2. (a) Morphology of the microchannel measured by the LCM; (b) cross-section profile.

Fig. 3. Relationship between the morphology and the laser power.

Fig. 4. Trend of width, depth, and roughness of microchannels varies with the temperature.

Fig. 5. SEM images of 15 mW heating at different temperatures and at an incubation time for 1 h. (a) Room temperature; (b) 400°C; (c) 800°C; the upper right corner is the selected area, and the lower right corner is the counting result.

Fig. 6. Relationship between the change rate of the morphology and the incubation time when the work piece is heated to 800°C.

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Thermal process of silica glass microchannels fabricated by femtosecond laser ablation Download： 908次

Fig. 1. Schematic diagram of the experimental setup. M, mirror; ND, neutral density attenuator.

Fig. 2. (a) Morphology of the microchannel measured by the LCM; (b) cross-section profile.

Fig. 3. Relationship between the morphology and the laser power.

Fig. 4. Trend of width, depth, and roughness of microchannels varies with the temperature.

Fig. 5. SEM images of 15 mW heating at different temperatures and at an incubation time for 1 h. (a) Room temperature; (b) 400°C; (c) 800°C; the upper right corner is the selected area, and the lower right corner is the counting result.

Fig. 6. Relationship between the change rate of the morphology and the incubation time when the work piece is heated to 800°C.

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